JPS63101865U - - Google Patents

Info

Publication number
JPS63101865U
JPS63101865U JP1986195868U JP19586886U JPS63101865U JP S63101865 U JPS63101865 U JP S63101865U JP 1986195868 U JP1986195868 U JP 1986195868U JP 19586886 U JP19586886 U JP 19586886U JP S63101865 U JPS63101865 U JP S63101865U
Authority
JP
Japan
Prior art keywords
temperature sensing
electrode
gas
rate sensor
sensing elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986195868U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452686Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986195868U priority Critical patent/JPH0452686Y2/ja
Publication of JPS63101865U publication Critical patent/JPS63101865U/ja
Application granted granted Critical
Publication of JPH0452686Y2 publication Critical patent/JPH0452686Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP1986195868U 1986-12-22 1986-12-22 Expired JPH0452686Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986195868U JPH0452686Y2 (cs) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986195868U JPH0452686Y2 (cs) 1986-12-22 1986-12-22

Publications (2)

Publication Number Publication Date
JPS63101865U true JPS63101865U (cs) 1988-07-02
JPH0452686Y2 JPH0452686Y2 (cs) 1992-12-10

Family

ID=31154152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986195868U Expired JPH0452686Y2 (cs) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPH0452686Y2 (cs)

Also Published As

Publication number Publication date
JPH0452686Y2 (cs) 1992-12-10

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