JPS63101171U - - Google Patents

Info

Publication number
JPS63101171U
JPS63101171U JP19677786U JP19677786U JPS63101171U JP S63101171 U JPS63101171 U JP S63101171U JP 19677786 U JP19677786 U JP 19677786U JP 19677786 U JP19677786 U JP 19677786U JP S63101171 U JPS63101171 U JP S63101171U
Authority
JP
Japan
Prior art keywords
reflow oven
tunnel
shield
movable frame
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19677786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0324283Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986196777U priority Critical patent/JPH0324283Y2/ja
Publication of JPS63101171U publication Critical patent/JPS63101171U/ja
Application granted granted Critical
Publication of JPH0324283Y2 publication Critical patent/JPH0324283Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP1986196777U 1986-12-23 1986-12-23 Expired JPH0324283Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986196777U JPH0324283Y2 (https=) 1986-12-23 1986-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986196777U JPH0324283Y2 (https=) 1986-12-23 1986-12-23

Publications (2)

Publication Number Publication Date
JPS63101171U true JPS63101171U (https=) 1988-07-01
JPH0324283Y2 JPH0324283Y2 (https=) 1991-05-27

Family

ID=31155891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986196777U Expired JPH0324283Y2 (https=) 1986-12-23 1986-12-23

Country Status (1)

Country Link
JP (1) JPH0324283Y2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000022898A1 (en) * 1998-10-13 2000-04-20 Matsushita Electric Industrial Co., Ltd. Heating device and heating method
JP2020141000A (ja) * 2019-02-27 2020-09-03 株式会社Ｆｕｊｉ 基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644712A (en) * 1979-09-14 1981-04-24 Kawasaki Steel Corp Opening and closing device of heating furnace
JPS5848557U (ja) * 1981-09-30 1983-04-01 株式会社日立製作所 機関車用屋根構造

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644712A (en) * 1979-09-14 1981-04-24 Kawasaki Steel Corp Opening and closing device of heating furnace
JPS5848557U (ja) * 1981-09-30 1983-04-01 株式会社日立製作所 機関車用屋根構造

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000022898A1 (en) * 1998-10-13 2000-04-20 Matsushita Electric Industrial Co., Ltd. Heating device and heating method
CN1317925C (zh) * 1998-10-13 2007-05-23 松下电器产业株式会社 加热装置和加热方法
JP2020141000A (ja) * 2019-02-27 2020-09-03 株式会社Ｆｕｊｉ 基板処理装置

Also Published As

Publication number Publication date
JPH0324283Y2 (https=) 1991-05-27

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