JPS63100780A - 圧力センサの製造方法 - Google Patents

圧力センサの製造方法

Info

Publication number
JPS63100780A
JPS63100780A JP24653786A JP24653786A JPS63100780A JP S63100780 A JPS63100780 A JP S63100780A JP 24653786 A JP24653786 A JP 24653786A JP 24653786 A JP24653786 A JP 24653786A JP S63100780 A JPS63100780 A JP S63100780A
Authority
JP
Japan
Prior art keywords
etching
pressure sensor
diaphragm
mask
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24653786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573276B2 (cs
Inventor
Shigemi Nohara
野原　繁美
Noriyasu Yamashita
山下　則康
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP24653786A priority Critical patent/JPS63100780A/ja
Publication of JPS63100780A publication Critical patent/JPS63100780A/ja
Publication of JPH0573276B2 publication Critical patent/JPH0573276B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Pressure Sensors (AREA)
  • Drying Of Semiconductors (AREA)
JP24653786A 1986-10-17 1986-10-17 圧力センサの製造方法 Granted JPS63100780A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24653786A JPS63100780A (ja) 1986-10-17 1986-10-17 圧力センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24653786A JPS63100780A (ja) 1986-10-17 1986-10-17 圧力センサの製造方法

Publications (2)

Publication Number Publication Date
JPS63100780A true JPS63100780A (ja) 1988-05-02
JPH0573276B2 JPH0573276B2 (cs) 1993-10-14

Family

ID=17149882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24653786A Granted JPS63100780A (ja) 1986-10-17 1986-10-17 圧力センサの製造方法

Country Status (1)

Country Link
JP (1) JPS63100780A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6427229A (en) * 1987-07-23 1989-01-30 Nissan Motor Etching method for semiconductor substrate
JPH01179853A (ja) * 1988-01-11 1989-07-17 Daikin Ind Ltd 空気調和装置
JPH02183532A (ja) * 1989-01-09 1990-07-18 Fujitsu Ltd 半導体微細装置の加工方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5240978A (en) * 1975-09-27 1977-03-30 Fujitsu Ltd Process for production of semiconductor device
JPS58140136A (ja) * 1982-02-16 1983-08-19 Seiko Epson Corp 半導体装置の製造方法
US4456501A (en) * 1983-12-22 1984-06-26 Advanced Micro Devices, Inc. Process for dislocation-free slot isolations in device fabrication
JPS59186377A (ja) * 1983-04-07 1984-10-23 Sanyo Electric Co Ltd 圧力センサの製造方法
JPS6180822A (ja) * 1984-09-27 1986-04-24 Nec Corp ブレ−ズド回折格子の作成方法
JPS61220335A (ja) * 1985-03-26 1986-09-30 Nec Corp エツチングの方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5240978A (en) * 1975-09-27 1977-03-30 Fujitsu Ltd Process for production of semiconductor device
JPS58140136A (ja) * 1982-02-16 1983-08-19 Seiko Epson Corp 半導体装置の製造方法
JPS59186377A (ja) * 1983-04-07 1984-10-23 Sanyo Electric Co Ltd 圧力センサの製造方法
US4456501A (en) * 1983-12-22 1984-06-26 Advanced Micro Devices, Inc. Process for dislocation-free slot isolations in device fabrication
JPS6180822A (ja) * 1984-09-27 1986-04-24 Nec Corp ブレ−ズド回折格子の作成方法
JPS61220335A (ja) * 1985-03-26 1986-09-30 Nec Corp エツチングの方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6427229A (en) * 1987-07-23 1989-01-30 Nissan Motor Etching method for semiconductor substrate
JPH01179853A (ja) * 1988-01-11 1989-07-17 Daikin Ind Ltd 空気調和装置
JPH02183532A (ja) * 1989-01-09 1990-07-18 Fujitsu Ltd 半導体微細装置の加工方法

Also Published As

Publication number Publication date
JPH0573276B2 (cs) 1993-10-14

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