JPS63100735U - - Google Patents

Info

Publication number
JPS63100735U
JPS63100735U JP1986194751U JP19475186U JPS63100735U JP S63100735 U JPS63100735 U JP S63100735U JP 1986194751 U JP1986194751 U JP 1986194751U JP 19475186 U JP19475186 U JP 19475186U JP S63100735 U JPS63100735 U JP S63100735U
Authority
JP
Japan
Prior art keywords
pellicle
frame
mask
pellicle frame
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986194751U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986194751U priority Critical patent/JPS63100735U/ja
Publication of JPS63100735U publication Critical patent/JPS63100735U/ja
Pending legal-status Critical Current

Links

JP1986194751U 1986-12-18 1986-12-18 Pending JPS63100735U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986194751U JPS63100735U (US07534539-20090519-C00280.png) 1986-12-18 1986-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986194751U JPS63100735U (US07534539-20090519-C00280.png) 1986-12-18 1986-12-18

Publications (1)

Publication Number Publication Date
JPS63100735U true JPS63100735U (US07534539-20090519-C00280.png) 1988-06-30

Family

ID=31152013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986194751U Pending JPS63100735U (US07534539-20090519-C00280.png) 1986-12-18 1986-12-18

Country Status (1)

Country Link
JP (1) JPS63100735U (US07534539-20090519-C00280.png)

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