JPS6294636U - - Google Patents

Info

Publication number
JPS6294636U
JPS6294636U JP18625885U JP18625885U JPS6294636U JP S6294636 U JPS6294636 U JP S6294636U JP 18625885 U JP18625885 U JP 18625885U JP 18625885 U JP18625885 U JP 18625885U JP S6294636 U JPS6294636 U JP S6294636U
Authority
JP
Japan
Prior art keywords
wafer
orientation flat
detection section
section
alignment point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18625885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18625885U priority Critical patent/JPS6294636U/ja
Publication of JPS6294636U publication Critical patent/JPS6294636U/ja
Pending legal-status Critical Current

Links

JP18625885U 1985-12-03 1985-12-03 Pending JPS6294636U (US20030157376A1-20030821-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18625885U JPS6294636U (US20030157376A1-20030821-M00001.png) 1985-12-03 1985-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18625885U JPS6294636U (US20030157376A1-20030821-M00001.png) 1985-12-03 1985-12-03

Publications (1)

Publication Number Publication Date
JPS6294636U true JPS6294636U (US20030157376A1-20030821-M00001.png) 1987-06-17

Family

ID=31135650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18625885U Pending JPS6294636U (US20030157376A1-20030821-M00001.png) 1985-12-03 1985-12-03

Country Status (1)

Country Link
JP (1) JPS6294636U (US20030157376A1-20030821-M00001.png)

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