JPS6294626U - - Google Patents

Info

Publication number
JPS6294626U
JPS6294626U JP18593585U JP18593585U JPS6294626U JP S6294626 U JPS6294626 U JP S6294626U JP 18593585 U JP18593585 U JP 18593585U JP 18593585 U JP18593585 U JP 18593585U JP S6294626 U JPS6294626 U JP S6294626U
Authority
JP
Japan
Prior art keywords
cvd apparatus
cylinder
air isolation
vertical cvd
outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18593585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18593585U priority Critical patent/JPS6294626U/ja
Publication of JPS6294626U publication Critical patent/JPS6294626U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP18593585U 1985-12-02 1985-12-02 Pending JPS6294626U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18593585U JPS6294626U (US07923587-20110412-C00022.png) 1985-12-02 1985-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18593585U JPS6294626U (US07923587-20110412-C00022.png) 1985-12-02 1985-12-02

Publications (1)

Publication Number Publication Date
JPS6294626U true JPS6294626U (US07923587-20110412-C00022.png) 1987-06-17

Family

ID=31135028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18593585U Pending JPS6294626U (US07923587-20110412-C00022.png) 1985-12-02 1985-12-02

Country Status (1)

Country Link
JP (1) JPS6294626U (US07923587-20110412-C00022.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0372649A (ja) * 1989-08-11 1991-03-27 Tokyo Electron Sagami Ltd 処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0372649A (ja) * 1989-08-11 1991-03-27 Tokyo Electron Sagami Ltd 処理装置

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