JPS6293668K1 - Angular speed/acceleration detector - Google Patents

Angular speed/acceleration detector

Info

Publication number
JPS6293668K1
JPS6293668K1 JP23340585A JP23340585A JPS6293668K1 JP S6293668 K1 JPS6293668 K1 JP S6293668K1 JP 23340585 A JP23340585 A JP 23340585A JP 23340585 A JP23340585 A JP 23340585A JP S6293668 K1 JPS6293668 K1 JP S6293668K1
Authority
JP
Grant status
Grant
Patent type
Prior art keywords
angular
speed
acceleration
detector
angular speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23340585A
Other versions
JPS6293668A (en )
Inventor
Yoshio Kawamura
Kazuo Sato
Tsuneo Terasawa
Shinji Tanaka
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/14Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
JP23340585A 1985-10-21 1985-10-21 Angular speed/acceleration detector Pending JPS6293668K1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23340585A JPS6293668K1 (en) 1985-10-21 1985-10-21 Angular speed/acceleration detector

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23340585A JPS6293668K1 (en) 1985-10-21 1985-10-21 Angular speed/acceleration detector
US06920426 US4750364A (en) 1985-10-21 1986-10-20 Angular velocity and acceleration sensor

Publications (2)

Publication Number Publication Date
JPS6293668A true JPS6293668A (en) 1987-04-30
JPS6293668K1 true JPS6293668K1 (en) 1987-04-30

Family

ID=16954557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23340585A Pending JPS6293668K1 (en) 1985-10-21 1985-10-21 Angular speed/acceleration detector

Country Status (2)

Country Link
US (1) US4750364A (en)
JP (1) JPS6293668K1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1118836A2 (en) 2000-01-19 2001-07-25 Alps Electric Co., Ltd. Capacitive micro sensor, gyroscope, and input device

Families Citing this family (86)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6429705A (en) * 1987-07-24 1989-01-31 Yazaki Corp Vibration type angular velocity detecting device
JPH067299Y2 (en) * 1987-07-24 1994-02-23 矢崎総業株式会社 Vibration-type angular velocity detection device
JPS6419112U (en) * 1987-07-24 1989-01-31
GB2208318B (en) * 1987-07-24 1991-11-06 Yazaki Corp Vibrational angular velocity sensor
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
US5253510A (en) * 1989-06-22 1993-10-19 I C Sensors Self-testable micro-accelerometer
DE4022495A1 (en) * 1990-07-14 1992-01-23 Bosch Gmbh Robert A micromechanical rotation rate sensor
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
JPH0644008B2 (en) * 1990-08-17 1994-06-08 アナログ・ディバイセス・インコーポレーテッド Monolithic accelerometer
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
DE4032559C2 (en) * 1990-10-13 2000-11-23 Bosch Gmbh Robert Yaw rate sensor and method for manufacturing
GB2276241B (en) * 1990-10-13 1995-04-05 Bosch Gmbh Robert Rate-of-rotation sensor
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5355712A (en) * 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
JPH05240874A (en) * 1991-12-06 1993-09-21 Canon Inc Angular-velocity sensor
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
JP3367113B2 (en) 1992-04-27 2003-01-14 株式会社デンソー Acceleration sensor
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
US5734105A (en) 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
JPH0646318U (en) * 1992-11-30 1994-06-24 多摩川精機株式会社 Gyro apparatus
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
JPH06249666A (en) * 1993-03-01 1994-09-09 Yukio Kagawa Vibration gyro
US5456109A (en) * 1993-03-29 1995-10-10 Delco Electronics Corporation Thick film rotational accelerometer having two structurally integrated linear acceleration sensors
US5461918A (en) * 1993-04-26 1995-10-31 Ford Motor Company Vibrating beam accelerometer
US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
US5786744A (en) * 1994-03-24 1998-07-28 Honda Giken Kogyo Kabushiki Kaisha Hybrid sensor
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5723790A (en) * 1995-02-27 1998-03-03 Andersson; Gert Monocrystalline accelerometer and angular rate sensor and methods for making and using same
DE19528961C2 (en) * 1995-08-08 1998-10-29 Daimler Benz Ag A micromechanical rotation rate sensor (DRS) and sensor arrangement
JPH09196682A (en) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd Angular velocity sensor and acceleration sensor
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5886259A (en) * 1996-04-01 1999-03-23 Alliedsignal Inc. Axis aligned rate and acceleration sensor
US5978972A (en) * 1996-06-14 1999-11-09 Johns Hopkins University Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head
JPH1026532A (en) * 1996-07-12 1998-01-27 Mitsubishi Electric Corp Semiconductor angular-velocity detecting device
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
JP2000097707A (en) 1998-09-18 2000-04-07 Fujitsu Ltd Acceleration sensor
EP1050743A3 (en) * 1999-05-07 2003-08-13 Alps Electric Co., Ltd. Tuning fork gyroscope
DE60037928D1 (en) * 1999-09-08 2008-03-20 Alps Electric Co Ltd Gyroscope and an input device for
DE60028696D1 (en) * 1999-11-09 2006-07-27 Alps Electric Co Ltd Centrifugal and input device
US6595056B2 (en) 2001-02-07 2003-07-22 Litton Systems, Inc Micromachined silicon gyro using tuned accelerometer
US6474160B1 (en) 2001-05-24 2002-11-05 Northrop Grumman Corporation Counterbalanced silicon tuned multiple accelerometer-gyro
US6619121B1 (en) 2001-07-25 2003-09-16 Northrop Grumman Corporation Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors
EP1490699A1 (en) * 2002-03-26 2004-12-29 The Charles Stark Draper Laboratory, INC. Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same
FI119528B (en) 2003-02-11 2008-12-15 Vti Technologies Oy Capacitive accelerometer structure
EP1608988B1 (en) * 2003-04-01 2007-09-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Acceleration sensor and method for detecting an acceleration
WO2004092745A1 (en) * 2003-04-15 2004-10-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Micromechanical component having an adjustable resonance frequency
DE10349014B4 (en) * 2003-10-17 2014-01-09 Austriamicrosystems Ag A micro-electromechanical yaw rate sensor
US20080098814A1 (en) * 2006-10-31 2008-05-01 Honeywell International Inc. Dual mode mems sensor
WO2008129865A1 (en) * 2007-04-13 2008-10-30 Panasonic Corporation Inertia force sensor
GB2450157B (en) * 2007-06-15 2011-12-21 Baker Hughes Inc System for determining an initial direction of rotation of an electrical submersible pump
DE102007057441A1 (en) * 2007-11-29 2009-06-04 Robert Bosch Gmbh A process for producing a micromechanical component having a volume-elastic medium and micromechanical device
US8187902B2 (en) * 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
EP2192382B1 (en) 2008-11-26 2012-08-29 STMicroelectronics Srl Microelectromechanical gyroscope with rotary driving motion and improved electrical properties
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
US8347716B2 (en) 2008-12-23 2013-01-08 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with enhanced rejection of acceleration noises
US8342025B2 (en) 2009-05-11 2013-01-01 Stmicroelectronics S.R.L. Microelectromechanical structure with enhanced rejection of acceleration noise
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
WO2011109382A1 (en) 2010-03-01 2011-09-09 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
US8833161B2 (en) 2010-04-20 2014-09-16 Sand 9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
WO2012040043A1 (en) 2010-09-20 2012-03-29 Sand9, Inc. Resonant sensing using extensional modes of a plate
RU2444703C1 (en) * 2010-10-01 2012-03-10 Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Сибирский Федеральный Университет" (Сфу) Vibration gyroscope
CN102997905B (en) * 2011-09-12 2017-04-12 意法半导体股份有限公司 Containing a gyroscope and an accelerometer MEMS device
KR101310408B1 (en) * 2011-09-29 2013-09-23 삼성전기주식회사 Inertial sensor and angular velocity detection method using the same
JP2013213728A (en) * 2012-04-02 2013-10-17 Seiko Epson Corp Gyro sensor and electronic apparatus
JP5963567B2 (en) * 2012-06-26 2016-08-03 日立オートモティブシステムズ株式会社 Inertial sensor
US9404747B2 (en) 2013-10-30 2016-08-02 Stmicroelectroncs S.R.L. Microelectromechanical gyroscope with compensation of quadrature error drift

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2544646A (en) * 1948-06-16 1951-03-13 Sperry Corp Angular velocity measuring instrument
FR1176197A (en) * 1957-05-24 1959-04-07 Bronzavia Sa Improvements to means for measuring the angular velocity of a rotating object organeou a
US3913405A (en) * 1974-08-16 1975-10-21 Singer Co Angular direction sensor
US4654663A (en) * 1981-11-16 1987-03-31 Piezoelectric Technology Investors, Ltd. Angular rate sensor system
US4592233A (en) * 1983-09-02 1986-06-03 Sundstrand Data Control, Inc. Angular base sensor utilizing parallel vibrating accelerometers
US4538461A (en) * 1984-01-23 1985-09-03 Piezoelectric Technology Investors, Inc. Vibratory angular rate sensing system
EP0171378B1 (en) * 1984-07-27 1990-06-13 Watson Industries, Inc. Angular rate sensor
US4674331A (en) * 1984-07-27 1987-06-23 Watson Industries Inc. Angular rate sensor
JPS61191917A (en) * 1985-02-20 1986-08-26 Tadashi Konno Tuning fork type vibration gyroscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1118836A2 (en) 2000-01-19 2001-07-25 Alps Electric Co., Ltd. Capacitive micro sensor, gyroscope, and input device

Also Published As

Publication number Publication date Type
JP62093668T1 (en) grant
JPS6293668A (en) 1987-04-30 application
US4750364A (en) 1988-06-14 grant

Similar Documents

Publication Publication Date Title
JPS6227666A (en) Accelerometer
JPS61159101A (en) Position and speed sensor
JPS60239613A (en) Angular velocity sensor
JPS62133937A (en) Percataneous sensor
JPS6246207A (en) Distance detector
EP0182085A3 (en) Position and speed sensors
JPS6225480A (en) Dithered laser angular velocity sensor
JPS62139629A (en) Percataneous sensor
JPS6214686A (en) Navigation system
JPS6252699A (en) Separation type sensor
JPS60213814A (en) Flat inertial sensor
JPS62115496A (en) Display speed decision system
JPS6250599A (en) Segment erector
JPS6386000A (en) Guidance unit
JPS61267823A (en) Detector
JPS61289692A (en) Part attitude detector
JPS62266485A (en) Photoelectron engineering acceleration measuring device
JPS61180200A (en) Gamma-ray generator
JPS63117728A (en) Ion sensor
JPS6327701A (en) Angular position determining device
JPS635251A (en) Overheating-point detector
JPS6310300A (en) Navigation system
JPS62164086A (en) Navigation system
JPS61249198A (en) Sensor unit
JPS62229796A (en) Acceleration tube