JPS6293207U - - Google Patents

Info

Publication number
JPS6293207U
JPS6293207U JP18613285U JP18613285U JPS6293207U JP S6293207 U JPS6293207 U JP S6293207U JP 18613285 U JP18613285 U JP 18613285U JP 18613285 U JP18613285 U JP 18613285U JP S6293207 U JPS6293207 U JP S6293207U
Authority
JP
Japan
Prior art keywords
guide surface
parallel
fixed part
movable part
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18613285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18613285U priority Critical patent/JPS6293207U/ja
Publication of JPS6293207U publication Critical patent/JPS6293207U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP18613285U 1985-12-02 1985-12-02 Pending JPS6293207U (US07345094-20080318-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18613285U JPS6293207U (US07345094-20080318-C00003.png) 1985-12-02 1985-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18613285U JPS6293207U (US07345094-20080318-C00003.png) 1985-12-02 1985-12-02

Publications (1)

Publication Number Publication Date
JPS6293207U true JPS6293207U (US07345094-20080318-C00003.png) 1987-06-15

Family

ID=31135406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18613285U Pending JPS6293207U (US07345094-20080318-C00003.png) 1985-12-02 1985-12-02

Country Status (1)

Country Link
JP (1) JPS6293207U (US07345094-20080318-C00003.png)

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