JPS6292643U - - Google Patents

Info

Publication number

JPS6292643U

JPS6292643U JP18502285U JP18502285U JPS6292643U JP S6292643 U JPS6292643 U JP S6292643U JP 18502285 U JP18502285 U JP 18502285U JP 18502285 U JP18502285 U JP 18502285U JP S6292643 U JPS6292643 U JP S6292643U

Authority

JP

Japan

Prior art keywords

brim

semiconductor substrate

drying apparatus

substrate drying

semicircular

Prior art date

1985-11-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 230000018044 dehydration Effects 0.000 claims description 2
• 238000006297 dehydration reaction Methods 0.000 claims description 2
• 238000001035 drying Methods 0.000 claims 2
• 238000005452 bending Methods 0.000 description 1