JPS6287440U - - Google Patents

Info

Publication number
JPS6287440U
JPS6287440U JP17960285U JP17960285U JPS6287440U JP S6287440 U JPS6287440 U JP S6287440U JP 17960285 U JP17960285 U JP 17960285U JP 17960285 U JP17960285 U JP 17960285U JP S6287440 U JPS6287440 U JP S6287440U
Authority
JP
Japan
Prior art keywords
clampers
probe card
actuator
guide
fixing mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17960285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037955Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17960285U priority Critical patent/JPH037955Y2/ja
Priority to US06/928,502 priority patent/US4721198A/en
Publication of JPS6287440U publication Critical patent/JPS6287440U/ja
Application granted granted Critical
Publication of JPH037955Y2 publication Critical patent/JPH037955Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17960285U 1985-11-13 1985-11-21 Expired JPH037955Y2 (cs)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17960285U JPH037955Y2 (cs) 1985-11-21 1985-11-21
US06/928,502 US4721198A (en) 1985-11-13 1986-11-07 Probe card clamping and changing mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17960285U JPH037955Y2 (cs) 1985-11-21 1985-11-21

Publications (2)

Publication Number Publication Date
JPS6287440U true JPS6287440U (cs) 1987-06-04
JPH037955Y2 JPH037955Y2 (cs) 1991-02-27

Family

ID=31122805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17960285U Expired JPH037955Y2 (cs) 1985-11-13 1985-11-21

Country Status (1)

Country Link
JP (1) JPH037955Y2 (cs)

Also Published As

Publication number Publication date
JPH037955Y2 (cs) 1991-02-27

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