JPS6284926U - - Google Patents

Info

Publication number

JPS6284926U

JPS6284926U JP17700785U JP17700785U JPS6284926U JP S6284926 U JPS6284926 U JP S6284926U JP 17700785 U JP17700785 U JP 17700785U JP 17700785 U JP17700785 U JP 17700785U JP S6284926 U JPS6284926 U JP S6284926U

Authority

JP

Japan

Prior art keywords

quartz tube

molecular beam

heater

heats

small balls

Prior art date

1985-11-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 6
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
• 239000013078 crystal Substances 0.000 claims description 2
• 229910052715 tantalum Inorganic materials 0.000 description 1
• GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1

Cited By (1)