JPS6282599U - - Google Patents

Info

Publication number
JPS6282599U
JPS6282599U JP17467085U JP17467085U JPS6282599U JP S6282599 U JPS6282599 U JP S6282599U JP 17467085 U JP17467085 U JP 17467085U JP 17467085 U JP17467085 U JP 17467085U JP S6282599 U JPS6282599 U JP S6282599U
Authority
JP
Japan
Prior art keywords
plasma
electrode
insulating material
gas
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17467085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17467085U priority Critical patent/JPS6282599U/ja
Publication of JPS6282599U publication Critical patent/JPS6282599U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP17467085U 1985-11-13 1985-11-13 Pending JPS6282599U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17467085U JPS6282599U (US06521211-20030218-C00004.png) 1985-11-13 1985-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17467085U JPS6282599U (US06521211-20030218-C00004.png) 1985-11-13 1985-11-13

Publications (1)

Publication Number Publication Date
JPS6282599U true JPS6282599U (US06521211-20030218-C00004.png) 1987-05-26

Family

ID=31113272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17467085U Pending JPS6282599U (US06521211-20030218-C00004.png) 1985-11-13 1985-11-13

Country Status (1)

Country Link
JP (1) JPS6282599U (US06521211-20030218-C00004.png)

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