JPS6280338U - - Google Patents

Info

Publication number

JPS6280338U

JPS6280338U JP17234285U JP17234285U JPS6280338U JP S6280338 U JPS6280338 U JP S6280338U JP 17234285 U JP17234285 U JP 17234285U JP 17234285 U JP17234285 U JP 17234285U JP S6280338 U JPS6280338 U JP S6280338U

Authority

JP

Japan

Prior art keywords

quartz

heat treatment

boat

groove

wafer

Prior art date

1985-11-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 16
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
• 238000010438 heat treatment Methods 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 235000012431 wafers Nutrition 0.000 description 4
• 238000010586 diagram Methods 0.000 description 1
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1