JPS6280325U - - Google Patents

Info

Publication number

JPS6280325U

JPS6280325U JP17316385U JP17316385U JPS6280325U JP S6280325 U JPS6280325 U JP S6280325U JP 17316385 U JP17316385 U JP 17316385U JP 17316385 U JP17316385 U JP 17316385U JP S6280325 U JPS6280325 U JP S6280325U

Authority

JP

Japan

Prior art keywords

cylindrical body

substrate

heat shield

body made

heat

Prior art date

1985-11-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims 3
• 239000013078 crystal Substances 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 238000005092 sublimation method Methods 0.000 description 1
• 238000001947 vapour-phase growth Methods 0.000 description 1