JPS6279578U - - Google Patents

Info

Publication number
JPS6279578U
JPS6279578U JP17027585U JP17027585U JPS6279578U JP S6279578 U JPS6279578 U JP S6279578U JP 17027585 U JP17027585 U JP 17027585U JP 17027585 U JP17027585 U JP 17027585U JP S6279578 U JPS6279578 U JP S6279578U
Authority
JP
Japan
Prior art keywords
photoresist
flat substrate
scattering
prevention wall
scattering prevention
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17027585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17027585U priority Critical patent/JPS6279578U/ja
Publication of JPS6279578U publication Critical patent/JPS6279578U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP17027585U 1985-11-05 1985-11-05 Pending JPS6279578U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17027585U JPS6279578U (US08063081-20111122-C00044.png) 1985-11-05 1985-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17027585U JPS6279578U (US08063081-20111122-C00044.png) 1985-11-05 1985-11-05

Publications (1)

Publication Number Publication Date
JPS6279578U true JPS6279578U (US08063081-20111122-C00044.png) 1987-05-21

Family

ID=31104855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17027585U Pending JPS6279578U (US08063081-20111122-C00044.png) 1985-11-05 1985-11-05

Country Status (1)

Country Link
JP (1) JPS6279578U (US08063081-20111122-C00044.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS525268A (en) * 1975-07-02 1977-01-14 Hitachi Ltd Rotary coating device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS525268A (en) * 1975-07-02 1977-01-14 Hitachi Ltd Rotary coating device

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