JPS6277377U - - Google Patents

Info

Publication number
JPS6277377U
JPS6277377U JP16810185U JP16810185U JPS6277377U JP S6277377 U JPS6277377 U JP S6277377U JP 16810185 U JP16810185 U JP 16810185U JP 16810185 U JP16810185 U JP 16810185U JP S6277377 U JPS6277377 U JP S6277377U
Authority
JP
Japan
Prior art keywords
valve member
switching
communicates
switching position
pressure port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16810185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235097Y2 (US06373033-20020416-M00071.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16810185U priority Critical patent/JPH0235097Y2/ja
Publication of JPS6277377U publication Critical patent/JPS6277377U/ja
Application granted granted Critical
Publication of JPH0235097Y2 publication Critical patent/JPH0235097Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
JP16810185U 1985-10-31 1985-10-31 Expired JPH0235097Y2 (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16810185U JPH0235097Y2 (US06373033-20020416-M00071.png) 1985-10-31 1985-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16810185U JPH0235097Y2 (US06373033-20020416-M00071.png) 1985-10-31 1985-10-31

Publications (2)

Publication Number Publication Date
JPS6277377U true JPS6277377U (US06373033-20020416-M00071.png) 1987-05-18
JPH0235097Y2 JPH0235097Y2 (US06373033-20020416-M00071.png) 1990-09-21

Family

ID=31100663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16810185U Expired JPH0235097Y2 (US06373033-20020416-M00071.png) 1985-10-31 1985-10-31

Country Status (1)

Country Link
JP (1) JPH0235097Y2 (US06373033-20020416-M00071.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007030139A (ja) * 2005-07-29 2007-02-08 Seiko Instruments Inc 真空チャック
WO2009008384A1 (ja) * 2007-07-11 2009-01-15 Sumitomo Heavy Industries, Ltd. サーボ弁及びこれを用いたエアアクチュエータ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007030139A (ja) * 2005-07-29 2007-02-08 Seiko Instruments Inc 真空チャック
JP4544529B2 (ja) * 2005-07-29 2010-09-15 セイコーインスツル株式会社 真空チャック
WO2009008384A1 (ja) * 2007-07-11 2009-01-15 Sumitomo Heavy Industries, Ltd. サーボ弁及びこれを用いたエアアクチュエータ

Also Published As

Publication number Publication date
JPH0235097Y2 (US06373033-20020416-M00071.png) 1990-09-21

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