JPS6275326A - Thermocouple input unit - Google Patents

Thermocouple input unit

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Publication number
JPS6275326A
JPS6275326A JP60216354A JP21635485A JPS6275326A JP S6275326 A JPS6275326 A JP S6275326A JP 60216354 A JP60216354 A JP 60216354A JP 21635485 A JP21635485 A JP 21635485A JP S6275326 A JPS6275326 A JP S6275326A
Authority
JP
Japan
Prior art keywords
thermocouples
thermocouple
voltage
multiplexer
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60216354A
Other languages
Japanese (ja)
Inventor
Noritaka Egami
江上 憲位
Yasutaka Hori
堀 保隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60216354A priority Critical patent/JPS6275326A/en
Publication of JPS6275326A publication Critical patent/JPS6275326A/en
Pending legal-status Critical Current

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  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

PURPOSE:To achieve a simpler and lower-cost construction while enabling highly accurate detection of a disconnection, by integrating a converter and an analog input card of an input unit. CONSTITUTION:Micro voltages generated from a plurality of thermocouples 1, 2 and 5 are drawn while switching them with a first multiplexer 9; after being amplified with an amplifier 10, the result is converted to a digital signal with an A/D converter 11 and then subjected to a linearity and span correction digitally with a corrector 13. On the other hand, a second multiplexer 16 runs a microcurrent to the respective thermocouples 1, 2 and 5 while sequentially switching them. This can reduce the period during which the current flows to the thermocouples 1, 2 and 5 so much that the difference in the DC impedance can be ignored between the thermocouples 1, 2 and 5, thereby enabling highly accurate detection of a disconnection in the thermocouples 1, 2 and 5.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は熱電対の断線を検出することができる熱電対
入力装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a thermocouple input device capable of detecting disconnection of a thermocouple.

〔従来の技術〕[Conventional technology]

第2図は従来の熱電対入力装置を示すブロック接続図で
あり、図において、(1)、(2)、(5)は熱電対、
シυ、(ハ)、(ホ)は熱電対(1)、(2)、(5)
の発止電圧を1〜5■の標準電圧に変換する電圧変換器
、(至)は各電圧変換器−、@、(至)からの1〜5v
の標準電圧をディジタル値に変えるアナログ入力カード
、である。また、第3図は各電圧変換器Qυ、■、(ハ
)のうちの例えば電圧変換器CIJの具体的回路を示し
、(6)は基準接点補償回路、6zはプリアンプ、儲は
リニアライザ、(財)はアイソレータ、αηは断線検出
のためのプルアップ回路で、これが電圧VBの入力端子
USと高抵抗θ9とを熱電対+11とプリアンプCJ5
とを結ぶラインに接続したものからなる。
FIG. 2 is a block connection diagram showing a conventional thermocouple input device. In the figure, (1), (2), and (5) are thermocouples,
υ, (c), (e) are thermocouples (1), (2), (5)
A voltage converter that converts the starting voltage of 1 to 5 standard voltages, (to) is 1 to 5 V from each voltage converter -, @, (to)
is an analog input card that converts standard voltages into digital values. Also, Fig. 3 shows a specific circuit of the voltage converter CIJ among the voltage converters Qυ, ■, and (c), in which (6) is the reference junction compensation circuit, 6z is the preamplifier, and Yu is the linearizer. ) is an isolator, αη is a pull-up circuit for detecting disconnection, and this connects the voltage VB input terminal US and high resistance θ9 to thermocouple +11 and preamplifier CJ5.
It consists of a line connected to the

次(こ動作について説明する。まず、例えば、熱電対(
1)で発生した温度に応じた微小電圧を、プリアンプG
3で増幅することにより1〜5vの標準電圧とする。こ
のとき、リニアライザ(至)は、熱電対(1)の発生電
圧と温度との非線形関係を補正して線形化する。また、
基準接点補償回路(6)は熱電対の基準接点(ここでは
、変換器の端子)と測定点との温度差を補償するように
動作する。プルアップ回路(lηでは、例えば熱電対(
1)が断線していない正常状態において、電圧VBによ
り熱電対(11に僅かの電流が流わるか、熱電対(1)
のインピーダンスが小さいので、この電流による熱電対
(1)の電圧降下が0に近くなり、抵抗11両端の電位
差が大きくなる。
Next (we will explain this operation. First, for example, a thermocouple (
The minute voltage generated in step 1) according to the temperature is applied to the preamplifier G.
A standard voltage of 1 to 5 V is obtained by amplifying the voltage by 3. At this time, the linearizer (to) corrects and linearizes the nonlinear relationship between the voltage generated by the thermocouple (1) and the temperature. Also,
The reference junction compensation circuit (6) operates to compensate for the temperature difference between the reference junction of the thermocouple (here the terminal of the converter) and the measurement point. In the pull-up circuit (lη, for example, a thermocouple (
1) is in a normal state with no disconnection, a small amount of current flows through the thermocouple (11) due to the voltage VB, or the thermocouple (1)
Since the impedance of the thermocouple (1) is small, the voltage drop across the thermocouple (1) due to this current becomes close to 0, and the potential difference between both ends of the resistor 11 becomes large.

これに対し、熱電対(11の断線時には、電圧VBがプ
リアンプC13にそのまま人力され、抵抗01両端の電
位差は殆んどなくなる。従って、抵抗α9の端子電圧の
違いを検出すれは、断線検出が可能となる。
On the other hand, when the thermocouple (11) is disconnected, the voltage VB is directly applied to the preamplifier C13, and the potential difference between both ends of the resistor 01 is almost eliminated. It becomes possible.

さらに、リニアライザ(ト)は温度fljil定範囲や
熱電対+1+、(2)、(5)の抽順に応じてプリアン
プC33の入出力の直線性を得るように調整される。
Furthermore, the linearizer (g) is adjusted to obtain linearity of the input and output of the preamplifier C33 according to the temperature fljil constant range and the drawing order of thermocouples +1+, (2), and (5).

〔発明かぁ・−決しようとする問題点〕従来の熱電対人
力装置は以上のように構成されているので、測定点が多
くなった場合に、熱電対(1)、(2)、(5)および
変換器C!υ、@、(ハ)もそれに応じて多数設置する
必要があり、各変換器Qυ、■、(ハ)の各出力レベル
のばらつきや、システムのコストアップを招くほか熱電
対の直流インピーダンスのばらつきによって断線検出が
高精度に行えないなどの問題点があった。
[Is this an invention? - Problem to be resolved] Since the conventional thermocouple manual device is configured as described above, when the number of measurement points increases, thermocouples (1), (2), (5) ) and converter C! It is necessary to install a large number of υ, @, (c) accordingly, which causes variations in the output levels of each converter Qυ, ■, (c), increases the cost of the system, and causes variations in the DC impedance of thermocouples. Therefore, there were problems such as the inability to detect disconnections with high accuracy.

この発明は上記のような問題点を解消するためになされ
たもので、従来の変換器やアナログ人力カードを一体化
して、構成の簡素化並びにローコスト化を図るとともに
、断線検出を高精度で実施できる熱電対入力装置を得る
ことを目的とする。
This invention was made to solve the above-mentioned problems, and by integrating the conventional converter and analog human power card, it is possible to simplify the configuration and reduce costs, as well as to detect disconnections with high accuracy. The purpose is to obtain a thermocouple input device that can be used.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る熱ゼ対入力装置の断線検出回路は、複数
の熱電対が発生する微小電圧を第1のマルチプレクサで
切り換えながら取り込み、その微小電圧をアンプによっ
て増幅後アナログ・ディジタル変換し、補正器において
ディジタル的にりニアリテイ、スパン補正を行なうとと
もに、第2のマルチプレクサで、各熱電対に微小電流を
流すよう1こし、熱電対の断線の検出を可能としたもの
である。
The disconnection detection circuit for a thermocouple input device according to the present invention takes in minute voltages generated by a plurality of thermocouples while switching them with a first multiplexer, amplifies the minute voltages with an amplifier, converts them from analog to digital, and converts them into a corrector. In addition to performing digital linearity and span corrections, the second multiplexer allows a minute current to flow through each thermocouple, making it possible to detect thermocouple disconnection.

〔作用〕[Effect]

この発明における断線検出用の第2のマルチプレクサは
、各熱電対に対し微小電流を順次切り換えながら流すた
め、各熱電対に電流が流れる期間が短かく、従って各熱
電対の直流インピーダンスの差を無視でき、熱電対の断
線検出を高精度で行なえるように作用する。
The second multiplexer for detecting disconnection in this invention sequentially switches a minute current through each thermocouple, so the period during which current flows through each thermocouple is short, and therefore the difference in DC impedance of each thermocouple is ignored. This function allows thermocouple disconnection detection to be performed with high accuracy.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。第1
図において、(1)、(2)、(5)は熱電対、(6)
は基準接点補償回路、(7)、(8)は補正用基準電圧
発生回路、(9)は熱電対の発生する微小電圧、基準接
点補償回路(6)の出力電圧および補正用基準電圧発生
回路(7)、(8)が出力する補正基準電圧をそれぞれ
切り換えて入力するための第1のマルチプレクサ、α〔
は微小電圧を差動で受けて増幅する差動アンプ、αυは
差動アンプQGのアナログ出力電圧をディジタル変換す
るアナログ・ディジタル変換器、峙はディジタル補正器
、αaは外部とのインターフェイス、Q2は熱電対の1
点毎の測定範囲及び熱電射程の記憶部、αηは断線検出
回路で、直流電圧VB入力用の入力端子α枠と抵抗1f
jRBの抵抗αjとからなる。
An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, (1), (2), (5) are thermocouples, (6)
is the reference junction compensation circuit, (7) and (8) are the reference voltage generation circuit for correction, (9) is the minute voltage generated by the thermocouple, the output voltage of the reference junction compensation circuit (6), and the reference voltage generation circuit for correction. The first multiplexer α [
is a differential amplifier that differentially receives and amplifies minute voltages, αυ is an analog-to-digital converter that converts the analog output voltage of differential amplifier QG into digital, the opposite is a digital corrector, αa is an interface with the outside, and Q2 is thermocouple 1
The storage unit for the measurement range and thermoelectric range for each point, αη is a disconnection detection circuit, and the input terminal α frame for DC voltage VB input and the resistor 1f
jRB and resistance αj.

また、ueはこの断線検出回路αηを熱電対1点毎に切
り換える第2のマルチプレクサ、α9は上記回路各部に
制御信号を送る制御部である。
Further, ue is a second multiplexer that switches the disconnection detection circuit αη for each thermocouple point, and α9 is a control unit that sends control signals to each part of the circuit.

次に動作について説明する。熱電対(1)、(2)、(
5)は温度に応じた微小電圧を発生する。その微小電圧
はマルチプレクサ(9)で選択され、差動アンプ凹で増
幅され、アナログ・ディジタル変換器t1υでディジタ
ル値に変換され、このディジタル出力は補正器413で
周囲温度や熱電対の種類に応じたデータをもとにディジ
タル的に演算を行ってスパンの補正を行い、その出力を
インタフェイス04)を介して外部に出力する。
Next, the operation will be explained. Thermocouples (1), (2), (
5) generates a minute voltage depending on the temperature. The small voltage is selected by a multiplexer (9), amplified by a differential amplifier, and converted to a digital value by an analog-to-digital converter t1υ. The span is corrected by performing digital calculations based on the obtained data, and the output is outputted to the outside via the interface 04).

次に、基準電圧発生回路(7)、(8)によるオフセッ
ト・ドリフトの補正の仕方を説明する。熱電対(1)、
(2)、(5)の真の発生電圧をvl、vl、v5、基
準電圧発生回路(力、(8)の基準7L圧をV7、■8
 とし、これらをマルチプレクサ(9)で選択して順次
取り込み、これらをアンプ顛で増幅し、アナログ・ディ
ジタル変換器0υで変換したディジタル値をそれぞれd
l、dl、d5、dl、d8とすれば、次のような関係
が成り立つ。
Next, a method of correcting offset drift by the reference voltage generation circuits (7) and (8) will be explained. thermocouple (1),
The true generated voltage in (2) and (5) is vl, vl, v5, the reference voltage generation circuit (power), the reference 7L pressure in (8) is V7, ■8
These are selected by the multiplexer (9) and taken in sequentially, these are amplified by the amplifier, and the digital values converted by the analog-to-digital converter 0υ are converted to d.
If l, dl, d5, dl, and d8, the following relationship holds true.

v1=に1 d1+a1、V2 =に2 d2+32、
V 5 = k5 d 5 +a 5V7=に7 d7
+a7、VB=に8dB+8にこで、アンプ[+1.A
/DコンバータUυはL配電圧v1、v2、v5、v7
、v8 について共通であるので、これらの各回路定数
に1、k2、k5、k7、k8およびal、a2、a5
、a4、a5は、そnぞ、11に1=に2;に5=に7
:に8、a1=a2=a5=a7 =a8という関係が
成り立ち、これらのことから、次の関係が成り立つ。
v1 = 1 d1 + a1, V2 = 2 d2 + 32,
V 5 = k5 d 5 +a 5V7=to 7 d7
+a7, VB = 8dB+8, amplifier [+1. A
/D converter Uυ is L distribution voltage v1, v2, v5, v7
, v8, so 1, k2, k5, k7, k8 and al, a2, a5 are added to each of these circuit constants.
, a4, a5 are 11 = 2; 5 = 7
:8, a1=a2=a5=a7=a8 holds true, and from these, the following relationship holds true.

コc”c’、v7、VaLt既知テアルfニーめ、dl
、d2、d5の値がドリフト等で変動したとしても、d
l、d8を同時に計測することにより、上式で熱電対(
1)、(2)、(5)の真の発生電圧v1、v2、v5
を計算することができる。また、熱電対(1)、(2)
、(5)は基準接点(ここでは端子)と測定点との温度
差に応じた電圧を発生するから、この基準接点の周囲温
度に応じた電圧を発生する基準接点補償回路(6)から
の出力も、マルチプレクサ(9)で選択して取り込み、
この出力によりif記のオフセット・ドリフトの補正を
行ない、後にこの補正後のデータを基準接点の温度とし
て熱電対の発生電圧から得られる温度に加えれば真の測
定温度が得られる。
ko c"c', v7, VaLt known tear f knee, dl
Even if the values of , d2, and d5 fluctuate due to drift, etc., d
By measuring l and d8 simultaneously, the thermocouple (
1), (2), (5) true generated voltages v1, v2, v5
can be calculated. Also, thermocouples (1), (2)
, (5) generates a voltage according to the temperature difference between the reference junction (terminal here) and the measurement point, so the reference junction compensation circuit (6) generates a voltage according to the ambient temperature of this reference junction. The output is also selected by the multiplexer (9) and taken in.
By using this output, the offset drift described in if is corrected, and later the corrected data is added as the temperature of the reference junction to the temperature obtained from the voltage generated by the thermocouple to obtain the true measured temperature.

次に、補正器αJの動作を説明をする。熱電対(11、
(2)、(5)とその周囲温度とは一般に非線形な関係
にあり、また、熱電対+1+、(2)、(5)の種類に
よってその発生電圧のレベルも非線形性も異なるため、
温度測定範囲ごとに、上記の周囲温度や熱電対(1)、
(2)、(5)の種類に応じてスパン補正を行なう必要
がある。この補正器αJが行なう演算は次のようになる
。まず、熱電対、基準接点補償回路の電圧Vは、となり
、ここではd itアナログ−ディジタル変換後のディ
ジタル値となる。
Next, the operation of the corrector αJ will be explained. Thermocouple (11,
There is generally a nonlinear relationship between (2), (5) and the surrounding temperature, and the level and nonlinearity of the generated voltage differ depending on the type of thermocouple +1+, (2), (5).
For each temperature measurement range, set the above ambient temperature, thermocouple (1),
It is necessary to perform span correction depending on the types of (2) and (5). The computation performed by this corrector αJ is as follows. First, the voltage V of the thermocouple and reference junction compensation circuit is as follows, and here it is a digital value after dit analog-to-digital conversion.

また、熱電対基準接点の周囲温度をTとすると、T=f
(Vl・・・・・・・・・非線形性の補正となる。さら
に、TA、 TBを測定したい温度のそれぞれ下限値、
上限値(記憶部0に記憶されている)、0人、DBをT
A、TBに対応したディジタル1直とすると、 が得られる。そしてこれらの各電圧■、周囲温度T1ス
パンDの各演算はマイクロプロセッサを用いて効率的に
実施される。
Also, if the ambient temperature of the thermocouple reference junction is T, then T=f
(Vl......This is a correction for nonlinearity.In addition, the lower limit values of the temperatures at which you want to measure TA and TB,
Upper limit value (stored in storage unit 0), 0 people, DB to T
Assuming a digital 1st shift corresponding to A and TB, the following is obtained. The calculations for each voltage (2), ambient temperature (T1) and span (D) are efficiently performed using a microprocessor.

次に、断線検出回路CL71について説明をする。第3
図の断線検出回路のように熱電対発生電圧計測のとき、
常に電圧VBを供給し続けていたのでは、熱電対を数1
0m以上も延ばし、かつ、何本かの熱電対を切り換えて
電圧を取り込む場合、各熱電対(1)、(2)、(5)
の直流インピーダンスの差が無視できなくなり、オフセ
ット誤差を生じる。従って、第2のマルチプレクサt1
eによってスイッチαeで測定する熱電対へ電圧Vaを
高抵抗α9を介して順次切換供給し、まず断線検出を行
なった後、直ちに電圧VBの供給を断ち、既述の回路で
熱電対発生電圧を計測すれば、断線検出回路によるオフ
セット誤差を除去することができる。
Next, the disconnection detection circuit CL71 will be explained. Third
When measuring the voltage generated by a thermocouple, as shown in the disconnection detection circuit shown in the figure,
If the voltage VB was constantly being supplied, the thermocouple would be
When extending over 0m and acquiring voltage by switching several thermocouples, each thermocouple (1), (2), (5)
The difference in DC impedance between the two cannot be ignored, resulting in an offset error. Therefore, the second multiplexer t1
e to sequentially switch and supply the voltage Va to the thermocouple measured by the switch αe via the high resistance α9, and after first detecting a disconnection, immediately cut off the supply of the voltage VB, and use the circuit described above to convert the voltage generated by the thermocouple. If measured, offset errors caused by the disconnection detection circuit can be removed.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば多数の熱電対が発生す
る微小電圧を第1のマルチプレクサにより取り込んで、
その各微小電圧をアンプで増幅した後アナログ・ディジ
タル変換するとともに、さらlこリニアリティ・スパン
の補正を補正器により実施するような構成としたことG
こよって、従来のように断線検出回路を備えた変換器を
各熱電対ごとに設置したシステムに対して、構成の簡素
化と大幅なコストダウンが図ることができるほか、第2
のマルチプレクサによって直流電源から微小電流を熱電
対のそれぞれに切換え供給することによって、各熱電対
の直流インピーダンスの誤差を無視でき、熱電対の断線
を高精度で検出できる効果がある。
As described above, according to the present invention, the minute voltages generated by a large number of thermocouples are taken in by the first multiplexer,
Each minute voltage is amplified by an amplifier and then converted from analog to digital, and the linearity span is also corrected by a corrector.
Therefore, compared to the conventional system in which a converter equipped with a disconnection detection circuit is installed for each thermocouple, it is possible to simplify the configuration and significantly reduce costs.
By switching and supplying a minute current from the DC power source to each thermocouple using the multiplexer, errors in the DC impedance of each thermocouple can be ignored, and thermocouple disconnection can be detected with high accuracy.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例による熱電対入力装置のブ
ロック接続図、第2図は従来の熱電対入力装置の概略を
示すブロック接続図、第3図は同じく変換器の詳細なブ
ロック接続図である。 (1)、(2)、(5)は熱電対、(6)は基準接点補
償回路、(7)、(8)は基準電圧発生回路、(9)は
第1のマルチプレクサ、Qlはアンプ、αυはアナログ
・ディジタル変換器、t13は補正器、αeは第2のマ
ルチプレクサ、αDは断線検出回路、u9は抵抗。 なお、図中、同一符号は同一、または相当部分を示す。
Fig. 1 is a block connection diagram of a thermocouple input device according to an embodiment of the present invention, Fig. 2 is a block connection diagram schematically showing a conventional thermocouple input device, and Fig. 3 is a detailed block connection diagram of a converter. It is a diagram. (1), (2), (5) are thermocouples, (6) is a reference junction compensation circuit, (7), (8) is a reference voltage generation circuit, (9) is a first multiplexer, Ql is an amplifier, αυ is an analog-to-digital converter, t13 is a corrector, αe is a second multiplexer, αD is a disconnection detection circuit, and u9 is a resistor. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] 複数の熱電対の測定温度に対応する微小電圧を切り換え
て取り込む第1のマルチプレクサと、上記微小電圧を増
巾するアンプと、このアンプで増巾した電圧をディジタ
ル値に変換するアナログ・ディジタル変換器と、上記デ
ィジタル値の信号を上記各熱電対の周囲温度や種類に応
じて補正する補正器と、上記熱電対のそれぞれに直流の
微小電流を断線検出用高抵抗を介して順次切り換えなが
ら流していく第2のマルチプレクサとを備えた熱電対入
力装置。
A first multiplexer that switches and takes in minute voltages corresponding to the temperatures measured by multiple thermocouples, an amplifier that amplifies the minute voltages, and an analog-to-digital converter that converts the voltage amplified by this amplifier into a digital value. , a corrector that corrects the digital value signal according to the ambient temperature and type of each of the thermocouples, and a small direct current flowing through each of the thermocouples while switching sequentially through a high resistance for detecting disconnection. and a second multiplexer.
JP60216354A 1985-09-30 1985-09-30 Thermocouple input unit Pending JPS6275326A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60216354A JPS6275326A (en) 1985-09-30 1985-09-30 Thermocouple input unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60216354A JPS6275326A (en) 1985-09-30 1985-09-30 Thermocouple input unit

Publications (1)

Publication Number Publication Date
JPS6275326A true JPS6275326A (en) 1987-04-07

Family

ID=16687241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60216354A Pending JPS6275326A (en) 1985-09-30 1985-09-30 Thermocouple input unit

Country Status (1)

Country Link
JP (1) JPS6275326A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01212325A (en) * 1988-02-19 1989-08-25 Mitsubishi Electric Corp Multipoint temperature measuring apparatus
JPH06187099A (en) * 1992-12-18 1994-07-08 Mitsubishi Electric Corp Input processing card and output processing card
JP4677681B2 (en) * 2001-05-07 2011-04-27 東京エレクトロン株式会社 Thermocouple signal processing apparatus, thermocouple signal processing method, and heat treatment apparatus
JP2018165641A (en) * 2017-03-28 2018-10-25 セイコーエプソン株式会社 Failure determination circuit, physical quantity detection device, electronic apparatus, and movable body

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50464A (en) * 1973-02-26 1975-01-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50464A (en) * 1973-02-26 1975-01-07

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01212325A (en) * 1988-02-19 1989-08-25 Mitsubishi Electric Corp Multipoint temperature measuring apparatus
JPH06187099A (en) * 1992-12-18 1994-07-08 Mitsubishi Electric Corp Input processing card and output processing card
JP4677681B2 (en) * 2001-05-07 2011-04-27 東京エレクトロン株式会社 Thermocouple signal processing apparatus, thermocouple signal processing method, and heat treatment apparatus
JP2018165641A (en) * 2017-03-28 2018-10-25 セイコーエプソン株式会社 Failure determination circuit, physical quantity detection device, electronic apparatus, and movable body

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