JPS6275303A - Displacement convertor - Google Patents

Displacement convertor

Info

Publication number
JPS6275303A
JPS6275303A JP21726085A JP21726085A JPS6275303A JP S6275303 A JPS6275303 A JP S6275303A JP 21726085 A JP21726085 A JP 21726085A JP 21726085 A JP21726085 A JP 21726085A JP S6275303 A JPS6275303 A JP S6275303A
Authority
JP
Japan
Prior art keywords
specimen
displacement
lens
sensor
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21726085A
Other languages
Japanese (ja)
Other versions
JPH0619244B2 (en
Inventor
Kenta Mikuriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP60217260A priority Critical patent/JPH0619244B2/en
Publication of JPS6275303A publication Critical patent/JPS6275303A/en
Publication of JPH0619244B2 publication Critical patent/JPH0619244B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To measure accurately amount of displacement of a specimen surface by directing parallel beams of light into a position other than that on the axis of lens and arranging 2 position sensors in a path of returning reflected beam through the lens.
CONSTITUTION: A light flux from a source 1 takes an incident position other than the axis of a lens 2 and is directed onto a surface 3 of a specimen. This reflected light is directed onto position sensors 8, 9 through lenses 2, 7. Thus, when the specimen surface 3 displaces up to 3', the path of the reflected light moves in the way as shown by broken lines and incident positions onto the sensor 8 move also causing a displacement of image position from P0 to P1. The sensor 8 feeds back this displacement output to an automatic focusing mechanism and the lens 2 is so displaced that the light flux of the source develops its focus on the surface 3 of the specimen. The amount of displacement of the surface 3 of the specimen is measured automatically from said amount of displacement. Further, in a state where the foreus in set on the surface 3 of the specimen, an incident position in the sensor 9 arranged with constant distances equivalent changes from a position P0' to P1' depending upon an inclination of the surface 3 of the specimen. Accordingly, the inclination of the surface 3 of the specimen is measured from the output of the sensor 9.
COPYRIGHT: (C)1987,JPO&Japio
JP60217260A 1985-09-30 1985-09-30 Displacement converter Expired - Lifetime JPH0619244B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60217260A JPH0619244B2 (en) 1985-09-30 1985-09-30 Displacement converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60217260A JPH0619244B2 (en) 1985-09-30 1985-09-30 Displacement converter

Publications (2)

Publication Number Publication Date
JPS6275303A true JPS6275303A (en) 1987-04-07
JPH0619244B2 JPH0619244B2 (en) 1994-03-16

Family

ID=16701355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60217260A Expired - Lifetime JPH0619244B2 (en) 1985-09-30 1985-09-30 Displacement converter

Country Status (1)

Country Link
JP (1) JPH0619244B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5329358A (en) * 1991-02-06 1994-07-12 U.S. Philips Corporation Device for optically measuring the height of a surface

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS506359A (en) * 1973-05-14 1975-01-23
JPS5689005A (en) * 1979-12-20 1981-07-20 Yokogawa Hokushin Electric Corp Position detector
JPS5776507A (en) * 1980-09-02 1982-05-13 Philips Nv Optical focusing device
JPS57211506A (en) * 1981-06-24 1982-12-25 Hitachi Ltd Non-contact type measuring device for shape of surface
JPS59154313A (en) * 1983-02-24 1984-09-03 Dainippon Screen Mfg Co Ltd Apparatus for measuring distance and slanting angle
JPS6117907A (en) * 1984-07-05 1986-01-25 Canon Inc Three-dimensional shape measuring instrument

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS506359A (en) * 1973-05-14 1975-01-23
JPS5689005A (en) * 1979-12-20 1981-07-20 Yokogawa Hokushin Electric Corp Position detector
JPS5776507A (en) * 1980-09-02 1982-05-13 Philips Nv Optical focusing device
JPS57211506A (en) * 1981-06-24 1982-12-25 Hitachi Ltd Non-contact type measuring device for shape of surface
JPS59154313A (en) * 1983-02-24 1984-09-03 Dainippon Screen Mfg Co Ltd Apparatus for measuring distance and slanting angle
JPS6117907A (en) * 1984-07-05 1986-01-25 Canon Inc Three-dimensional shape measuring instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5329358A (en) * 1991-02-06 1994-07-12 U.S. Philips Corporation Device for optically measuring the height of a surface

Also Published As

Publication number Publication date
JPH0619244B2 (en) 1994-03-16

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