JPS6274331U - - Google Patents

Info

Publication number

JPS6274331U

JPS6274331U JP16737685U JP16737685U JPS6274331U JP S6274331 U JPS6274331 U JP S6274331U JP 16737685 U JP16737685 U JP 16737685U JP 16737685 U JP16737685 U JP 16737685U JP S6274331 U JPS6274331 U JP S6274331U

Authority

JP

Japan

Prior art keywords

semiconductor

heat

inner tube

heating furnace

tube made

Prior art date

1985-10-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000002791 soaking Methods 0.000 claims description 3
• 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 4
• 238000010438 heat treatment Methods 0.000 claims 2
• MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 229910001882 dioxygen Inorganic materials 0.000 claims 1
• 239000003779 heat-resistant material Substances 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1