JPS6271891U - - Google Patents

Info

Publication number

JPS6271891U

JPS6271891U JP16364185U JP16364185U JPS6271891U JP S6271891 U JPS6271891 U JP S6271891U JP 16364185 U JP16364185 U JP 16364185U JP 16364185 U JP16364185 U JP 16364185U JP S6271891 U JPS6271891 U JP S6271891U

Authority

JP

Japan

Prior art keywords

heating element

quartz tube

reflective film

film

far

Prior art date

1985-10-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 3
• 239000010453 quartz Substances 0.000 claims description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
• 150000002736 metal compounds Chemical class 0.000 claims 1