JPS6271042A - 光メモリ素子 - Google Patents

光メモリ素子

Info

Publication number
JPS6271042A
JPS6271042A JP60211660A JP21166085A JPS6271042A JP S6271042 A JPS6271042 A JP S6271042A JP 60211660 A JP60211660 A JP 60211660A JP 21166085 A JP21166085 A JP 21166085A JP S6271042 A JPS6271042 A JP S6271042A
Authority
JP
Japan
Prior art keywords
film
aluminum
optical memory
memory element
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60211660A
Other languages
English (en)
Other versions
JPH0418377B2 (ja
Inventor
Yoshiteru Murakami
善照 村上
Akira Takahashi
明 高橋
Yoshikazu Fujii
義和 藤居
Hiroyuki Katayama
博之 片山
Kenji Oota
賢司 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP60211660A priority Critical patent/JPS6271042A/ja
Priority to CA000517495A priority patent/CA1264852A/en
Priority to US06/908,716 priority patent/US4792474A/en
Priority to DE8686307305T priority patent/DE3669605D1/de
Priority to EP86307305A priority patent/EP0216634B1/en
Publication of JPS6271042A publication Critical patent/JPS6271042A/ja
Publication of JPH0418377B2 publication Critical patent/JPH0418377B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B7/2578—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/254—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of protective topcoat layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24306—Metals or metalloids transition metal elements of groups 3-10
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25708—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 13 elements (B, Al, Ga)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/2571—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 14 elements except carbon (Si, Ge, Sn, Pb)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25713—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing nitrogen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 く技術分野〉 本発明はレーザ等の光により情報の記録、再生、消去等
を行なう光メモリ素子に関するものである。
〈従来技術〉 近年、光メモリ素子は高密度、大容量なメモリとなる為
、多方面で種力の研究開発が行なわれている。特に使用
者が情報の追加記録をなし得るメモリ、あるいは使用者
が情報の追加記録及び消去をなし肯るメモリは巾広い応
用分野があり、種々の材料やシステｌ、が発表されてい
る。前者のメモリの利料としてけＴｅＯｘ、ＴｅＳｅ　
、ＴｅＣ等があＴｂＦｅＣｏ等の希土類遷移金属合金薄
膜等がある。
しかし、これら情報の追加記録ができるメモリ、あるい
は情報の追加記録及び消去ができるメモリの基本となる
記録媒体材料は酸化等の耐食性に欠ける為、その対策と
してメモリ素子の構造には色々な工夫かなされている。
たとえば追加記録をなし得るメモリとして用いられる記
録材料を用い之場合には第８図に示す様に透明基板１上
に真空蒸着やスパッタリング等の製膜手段によシ記録媒
体漢２を設け、該記録媒体膜２を酸化等の腐食から保護
する目的で保護層３を設けたものがある。また情報の追
加記録及び消去ができるメモリとして用いられる希土類
遷移金属合金薄膜の場合には、たとえば第９図に示す様
に透明基板１上に保護層３と、希土類と移金属合金薄膜
２と、保護層４とをこの順にて積層したもの、あるいは
更に反射層５を第４番目の層として付加したもの（第１
０図参照）がある。しかし前述の如き保護層を設ける素
子構成を用いても酸化等の腐食を防止できると以下に使
用者が情報の追加記録及び消去をなし得る光メモリ素子
である磁気光学記憶素子の酸化の問題について例を挙げ
て説明する。
第１１図は木発明者等が調査を行った磁気光学記憶素子
の一部側面断面図である。６はカラス基板であシ、該ガ
ラス基板６上に第１の透明誘電体保護膜であるＳｉＯ膜
７（膜厚１２０ｎｍ）が形が形成され、該ＧｄＴｂＦｅ
合金薄膜８上に第２の透明誘電体保護膜であるＳｉＯ□
膜９（膜厚５０ｎｍ）が形成され、該５ｉ０２膜９上に
反射膜であるＣ　ＩＩ膜１０（膜厚５０ｎｍ）が形成さ
れている。この磁気光学記憶素子を高温高湿テストにか
けたところ、ＧｄＴｂ）ｅ合金薄膜８が酸化°　　され
るという問題が発生した。木発明者等はこの原因が上記
ＳｉＯ膜７及び５ｉｎ２膜９中に含まれる酸素にあるこ
とを確認した。即ち上記ＳｉＯ膜７及び５ｉ０２膜９の
成膜時、あるいは成膜後（（内部の酸素成分が分離等し
てＧ　ｄ　Ｔ　ｂ　Ｆ　ｅ合金薄膜８が酸化されるもの
である。しかるに、希土類遷移金属合金薄膜８は酸化さ
れることによって磁気記録媒体としての能力を著しく阻
害されるものであるから、上記酸化の問題は極めて重大
である。又、」二記希土類遷移金属合金薄膜８の膜厚が
薄ｒ場合は僅かの酸化であっても影響が大きいので非常
な注意が必要である。よって、この場合上記希土類遷移
金属合金薄膜８を保護する保護膜としては窒化アルミニ
ウム等の酸素を含まないものが良い事を既に本出願人は
提案している（特願昭５７−２２０９９９　）。しかし
この窒化アルミニウムは熱伝導率が高いため記録の際に
高いレーザパワーが必要となる。言い換えれば記録感度
の低い光メモリ素子となることが欠点である。
〈発明の目的〉 本発明は上記の点に鑑み、酸素等による記録媒体の酸化
に対し信頼性を高め且つ記録感度を向上せしめる光メモ
リ素子を提供することを目的としてなされた、ものであ
シ、この目的を達成するため光メモリ素子の一部に窒化
アルミニウムシリコンを用いたものである。
〈発明の実施例〉 以下、本発明に係る光メモ・ノ素子の一実施例について
図面を用いて詳細に説明する。
第１図は本発明に係る光メモリ素子の一実施例の構造を
示す一部側面断面図である。１はガラス、ポリカーボネ
ート、アクリル等の透明基板であシ、該透明基板１上に
第１の透明誘電体膜である窒化アルミニウムシリコン膜
１１が形成され、該窒化アルミニウムシリコン膜１１上
に希土類遷移金属合金薄膜１２（たとえばＧｄＴｂＦｅ
、ＧｄＴｂＤｙＦｅ、ＴｂＦｅＣｏ等）が形成され、該
希土類遷移金属合金薄膜１２上に第２の透明誘電体膜で
ある窒化アルミニウムシリコン膜１３が形成され、該窒
化アルシミニウムシリコン膜１３上にＣ’ｕ＋Ａｇ、Ａ
６等の反射膜１４が形成される。この構造の有利な点に
ついて以下説明する。
■　窒化アｌレミニウムシリコン膜は極めて安定であり
、窒化物であるため酸化物の膜に比較して緻密な２嘆が
形成できる。
■　窒化アルミニウムシリコンはその成分として酸素を
也有しないので記録媒体膜が酸化される危険性を極度に
減少せしめ得る。
■　窒化アルミニウムシリコンは上記■、■ヲ満足する
耐湿耐酸素性膜として有用な窒化アｐミニワムに比べ熱
伝導率か低く、記課媒体への記録感度を向上せしめる効
果をもたらす。第２図はこの効果を調べる為に行った実
験結果を示すもので、第１図に構成を示した光メモリ素
イにおいて、第１．第２の誘電体膜である窒化アルミニ
ウムシリコン膜のシリコンＡｆｌ成（ｗｔ％）を０〜８
％の範囲で変化させ記録感度の変化を見えものである。
記録感度は一部パワーで記録した時のピントの大きさで
判断した。第２図から明らかなように誘電体膜として窒
化アルミニウムヲ月いたトキよりも窒化アルミニウムシ
リコン膜を用いた方が記録感度が向上している。
本発明は、記録媒体の保護膜及び記録感度上昇用膜とし
て短化アルミニウムシリコンを用いたものであるが記録
材料の種類は問わず、光メモリ素子の構成としては少な
くとも一層に窒化アルミニウムシリコンを用いていれば
それ以外についてはいかなる構成でも良い。即ち、第３
図に示すように透明基板１上に記録媒体膜２、窒化アル
ミニウムシリコン膜１５をこの順に積層したもの、又第
４図に示すように透明基板ｌ上に記録媒体膜２、窒化ア
ルミニウムシリコン膜１５、反射！１ｌ１４をこの順に
積層したもの、又第５図に示すように透明基板１上に窒
化アルミニウムシリコン膜１５、記録媒体膜２、反射膜
１４をこの順に積層したもの、又第６図に示すように透
明基板１上に第１の誘電体膜１６、記録媒体膜２、第２
の誘電体ｇ！１７をこの順に積層したものにおいて、上
記第１、第２の誘電体膜の少なくとも一方が窒化アルミ
ニ・クムシリコンで形成されたもの、又、第７図に示す
ように透明基板１上に第１の［体［１ε、記録媒体膜２
、第２の誘電体膜１７、反射膜１４をこの順に積層した
ものにおいて上記第１．第２の誘電体膜の少なくとも一
方が窒化アｙミニウムシリコンで形成されたもの等の構
成が適用可能である。
〈発明の効果〉 以上のように本発明によれば記録媒体の耐酸化性及び情
報の記録再生特性を共に良好に確保せしめることができ
るものである。
【図面の簡単な説明】
第１図は本発明に係る光メモリ素子の一実施例の構成を
示す−ｇ（Ｓｔｌｌｌｌ而断面図、面２図は測定グラフ
図、＠３図、第４図、第５図、第６図、第７図は本発明
Ｋｉる光メモリ素子の他の実施例の構成を示す一部側面
断面図、第８図は、従来の光メモ図、第１１図は従来の
光メモリ素子の一部側面断面図である。 図中、１：透明基板　　２：記録媒体膜３．４：保Ｍ膜
　　５：反射膜 ６：ガフス基板　　７：ＳｉＯ膜 ８：ＧｄＴｂＦｅ合金薄膜　　９　：　５ｉ０２膜　　
１０　：Ｃｕ膜　　１１：第１の窒化アルミニウムシリ
コンＩＩＩ　　　１２：希土類遷移金属合金薄膜　　１
３：第２の窒化アルミニウムシリコン嘆　　１４：［［ １５：ｉ化アルミニウムシリコン膜 １６：第１の誘電体膜　　１７：＠２の誘電体膜 代理人　弁理士　　福　士　愛　彦Ｃ（ＩｔｚＱ名）第
１図 第２［；２１ 第７図 第８図 第１Ｏ図 第１１図

Claims (1)

    【特許請求の範囲】
  1. １、光メモリ素子の基板上に記録媒体膜と、窒化アルミ
    ニウムシリコン膜とをこの順にて積層したことを特徴と
    する光メモリ素子。
JP60211660A 1985-09-24 1985-09-24 光メモリ素子 Granted JPS6271042A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60211660A JPS6271042A (ja) 1985-09-24 1985-09-24 光メモリ素子
CA000517495A CA1264852A (en) 1985-09-24 1986-09-04 Optical memory element
US06/908,716 US4792474A (en) 1985-09-24 1986-09-18 Optical memory element
DE8686307305T DE3669605D1 (de) 1985-09-24 1986-09-23 Optisches speicherelement.
EP86307305A EP0216634B1 (en) 1985-09-24 1986-09-23 Optical memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60211660A JPS6271042A (ja) 1985-09-24 1985-09-24 光メモリ素子

Publications (2)

Publication Number Publication Date
JPS6271042A true JPS6271042A (ja) 1987-04-01
JPH0418377B2 JPH0418377B2 (ja) 1992-03-27

Family

ID=16609477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60211660A Granted JPS6271042A (ja) 1985-09-24 1985-09-24 光メモリ素子

Country Status (5)

Country Link
US (1) US4792474A (ja)
EP (1) EP0216634B1 (ja)
JP (1) JPS6271042A (ja)
CA (1) CA1264852A (ja)
DE (1) DE3669605D1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62291734A (ja) * 1986-06-10 1987-12-18 Seiko Epson Corp 光磁気記録媒体の製造方法
JPH02302947A (ja) * 1989-05-16 1990-12-14 Fuji Photo Film Co Ltd 光磁気記録媒体

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3778389D1 (de) * 1986-02-05 1992-05-27 Oki Electric Ind Co Ltd Magnetisch-optisches gedaechtnismedium.
NL8702493A (nl) * 1986-10-31 1988-05-16 Seiko Epson Corp Optisch opnamemedium en werkwijze voor het vervaardigen daarvan.
JPS63311642A (ja) * 1987-06-12 1988-12-20 Sharp Corp 光メモリ素子
DE3802998A1 (de) * 1988-02-02 1989-08-10 Basf Ag Verfahren zur herstellung einer duennen roentgenamorphen aluminiumnitrid- oder aluminiumsiliciumnitridschicht auf einer oberflaeche
DE3803014A1 (de) * 1988-02-02 1989-08-10 Basf Ag Verfahren zur herstellung einer duennen roentgenamorphen aluminiumnitrid- oder aluminiumsiliciumnitrid-schicht auf einer oberflaeche
EP0349271B1 (en) * 1988-06-28 1995-02-22 Sharp Kabushiki Kaisha Magneto-optic memory device
JPH0264944A (ja) * 1988-08-30 1990-03-05 Mitsubishi Electric Corp 光磁気記録媒体
JPH02254648A (ja) * 1989-03-28 1990-10-15 Seiko Epson Corp 光磁気ディスク
US5156909A (en) * 1989-11-28 1992-10-20 Battelle Memorial Institute Thick, low-stress films, and coated substrates formed therefrom, and methods for making same
US5514468A (en) * 1991-04-17 1996-05-07 Shin-Etsu Chemical Co., Ltd. Magneto-optical recording medium
CA2083865C (en) * 1991-12-04 1998-09-29 Masahiko Sekiya Substrate for optical recording medium and magneto-optical recording medium using same
US5587216A (en) * 1992-10-16 1996-12-24 Matsushita Electric Industrial Co., Ltd. Optical recording medium
DE69326525T2 (de) * 1992-11-17 2000-01-27 Mitsubishi Chemical Corp., Tokio/Tokyo Magnetooptischer Aufzeichnungträger und Verfahren zur Aufzeichnung und Wiedergabe von optischer Information
US7613869B2 (en) * 2006-11-27 2009-11-03 Brigham Young University Long-term digital data storage
CN102484067A (zh) 2009-06-26 2012-05-30 康奈尔大学 包括铝-硅氮化物钝化的用于形成iii-v半导体结构的方法
WO2010151856A2 (en) 2009-06-26 2010-12-29 Cornell University Chemical vapor deposition process for aluminum silicon nitride

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6231052A (ja) * 1985-04-25 1987-02-10 Seiko Epson Corp 光記録媒体

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2437668A1 (fr) * 1978-09-29 1980-04-25 Thomson Csf Disque optique protege
DE3039821A1 (de) * 1980-10-22 1982-06-03 Robert Bosch Gmbh, 7000 Stuttgart Mehrschichtsystem fuer waermeschutzanwendung
JPS5933320B2 (ja) * 1981-04-03 1984-08-15 株式会社東芝 光学的情報記録媒体
IL63802A (en) * 1981-09-11 1984-10-31 Iscar Ltd Sintered hard metal products having a multi-layer wear-resistant coating
JPS599094A (ja) * 1982-07-09 1984-01-18 Asahi Chem Ind Co Ltd 情報記録用部材
US4510593A (en) * 1982-10-18 1985-04-09 Minnesota Mining And Manufacturing Company Information disk of grooved, metal-coated crosslinked polymeric layer
JPH0613238B2 (ja) * 1982-11-08 1994-02-23 株式会社リコー 光学的情報記録媒体
NL8301072A (nl) * 1983-03-28 1984-10-16 Philips Nv Optische registratieschijf.
JPS59227049A (ja) * 1983-06-07 1984-12-20 Fuji Photo Film Co Ltd 情報記録媒体
US4619865A (en) * 1984-07-02 1986-10-28 Energy Conversion Devices, Inc. Multilayer coating and method
US4777068A (en) * 1984-08-10 1988-10-11 Canon Kabushiki Kaisha Optical recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6231052A (ja) * 1985-04-25 1987-02-10 Seiko Epson Corp 光記録媒体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62291734A (ja) * 1986-06-10 1987-12-18 Seiko Epson Corp 光磁気記録媒体の製造方法
JPH02302947A (ja) * 1989-05-16 1990-12-14 Fuji Photo Film Co Ltd 光磁気記録媒体

Also Published As

Publication number Publication date
US4792474A (en) 1988-12-20
JPH0418377B2 (ja) 1992-03-27
CA1264852A (en) 1990-01-23
EP0216634A1 (en) 1987-04-01
EP0216634B1 (en) 1990-03-14
DE3669605D1 (de) 1990-04-19

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