JPS6267249U - - Google Patents

Info

Publication number

JPS6267249U

JPS6267249U JP15777385U JP15777385U JPS6267249U JP S6267249 U JPS6267249 U JP S6267249U JP 15777385 U JP15777385 U JP 15777385U JP 15777385 U JP15777385 U JP 15777385U JP S6267249 U JPS6267249 U JP S6267249U

Authority

JP

Japan

Prior art keywords

oxygen

solid electrolyte

oxygen concentration

pair

substrate

Prior art date

1985-10-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000001301 oxygen Substances 0.000 claims description 12
• 229910052760 oxygen Inorganic materials 0.000 claims description 12
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
• 239000007784 solid electrolyte Substances 0.000 claims description 6
• 238000001514 detection method Methods 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 4
• 125000006850 spacer group Chemical group 0.000 claims description 3
• 239000000853 adhesive Substances 0.000 claims description 2
• 230000001070 adhesive effect Effects 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims description 2
• 238000002485 combustion reaction Methods 0.000 claims 2
• 238000005259 measurement Methods 0.000 claims 2
• 239000007789 gas Substances 0.000 claims 1