JPS6264767U - - Google Patents

Info

Publication number

JPS6264767U

JPS6264767U JP15529985U JP15529985U JPS6264767U JP S6264767 U JPS6264767 U JP S6264767U JP 15529985 U JP15529985 U JP 15529985U JP 15529985 U JP15529985 U JP 15529985U JP S6264767 U JPS6264767 U JP S6264767U

Authority

JP

Japan

Prior art keywords

vapor deposition

deposition apparatus

shielding plate

metal electrode

utility

Prior art date

1985-10-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007740 vapor deposition Methods 0.000 claims description 8
• 239000002184 metal Substances 0.000 claims 2
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1
• HEPLMSKRHVKCAQ-UHFFFAOYSA-N lead nickel Chemical compound [Ni].[Pb] HEPLMSKRHVKCAQ-UHFFFAOYSA-N 0.000 description 1