JPS6263949U - - Google Patents

Info

Publication number

JPS6263949U

JPS6263949U JP15482885U JP15482885U JPS6263949U JP S6263949 U JPS6263949 U JP S6263949U JP 15482885 U JP15482885 U JP 15482885U JP 15482885 U JP15482885 U JP 15482885U JP S6263949 U JPS6263949 U JP S6263949U

Authority

JP

Japan

Prior art keywords

pressure

diaphragm portion

semiconductor substrate

emitter

base layer

Prior art date

1985-10-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1