JPS6257112A - Production of magnetic head chip - Google Patents

Production of magnetic head chip

Info

Publication number
JPS6257112A
JPS6257112A JP19692385A JP19692385A JPS6257112A JP S6257112 A JPS6257112 A JP S6257112A JP 19692385 A JP19692385 A JP 19692385A JP 19692385 A JP19692385 A JP 19692385A JP S6257112 A JPS6257112 A JP S6257112A
Authority
JP
Japan
Prior art keywords
magnetic material
composite
magnetic
glass
units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19692385A
Other languages
Japanese (ja)
Inventor
Hiroyuki Tawara
博之 田原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP19692385A priority Critical patent/JPS6257112A/en
Publication of JPS6257112A publication Critical patent/JPS6257112A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To produce a magnetic head chip having high performance at a low cost by cutting out the individual head chips in the state in which auxiliary cores are united to an alloy magnetic material from a plate-shaped composite magnetic material block formed by uniting three materials; an oxide magnetic material, nonmagnetic material and alloy magnetic material to one body. CONSTITUTION:Grooves 2 sized 0.2-0.5mm width and 0.3-0.5mm depth are formed to a single crystal ferrite substrate 1 and PbO glass 3 is poured into the grooves 2, then the front and rear faces are ground to obtain a composite substrate 6. A thin film 7 consisting of 'Sendust(R)' or the like is then formed to 10-60mum thickness on a smooth surface 4 and the substrate is cut along the boundaries between the single crystal ferrite 1a and the glass 3 at every other boundaries to form composite material units 8. These units are laminated to obtain a block 9. Piece units 10 are cut out of the block at a prescribed azimuth angle and the cut units are cut at the part to form a gap butt face 11 to obtain a pair of pieces 12, 12. A groove 13 for winding and a groove 14 for joining are formed to the butt faces 11 along the longitudinal direction. After the butt faces 11, 11 are polished, SiO2 or the like is stuck to the faces 11 and the faces are joined by using glass having the softening point lower than the softening point of the glass 3 in the grooves 13, 14.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、映像信号など高周波成分を含む信号を高抗磁
力を有するメタルテープ等の記録媒体に記録再生するの
に適した磁気ヘッドのヘッドチップの製造方法に関する
[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a magnetic head suitable for recording and reproducing signals including high frequency components such as video signals on a recording medium such as a metal tape having a high coercive force. This invention relates to a method for manufacturing a chip.

〈従来の技術〉 白デオテーブレコーダ等に用いられる磁気ヘッドのコア
には、通常、耐摩耗性及び高周波帯域での透磁率に優れ
た単結晶フェライトのような酸化物磁性材料が使用され
ている。ところで、近年、機器の小型化が促進されるに
つれて記録密度が高くなってきており、このような高密
度記録には、例えば、テープの場合、酸化鉄テープより
も抗磁力の大きいメタルテープの方が適している。しが
しながら、このメタルテープに対して単結晶フェライト
を用いた磁気ヘッドを使用すると、単結晶フェライトは
、飽和磁束密度が低いという特性が。
<Prior art> The core of magnetic heads used in white radio table recorders and the like usually uses an oxide magnetic material such as single-crystal ferrite, which has excellent wear resistance and magnetic permeability in high frequency bands. . Incidentally, in recent years, recording densities have been increasing as equipment has become more compact, and for such high-density recording, for example, metal tapes, which have a higher coercive force than iron oxide tapes, are preferred. is suitable. However, when using a magnetic head using single-crystal ferrite with this metal tape, single-crystal ferrite has a characteristic of low saturation magnetic flux density.

あるため、メタルテ−プを十分に磁化させることができ
ないという問題点が生ずる。
Therefore, a problem arises in that the metal tape cannot be sufficiently magnetized.

そこで、飽和磁束密度の大きなセンダスト・アモルファ
ス金属などの合金磁性材料が磁気ヘッドの素材として注
目されるに至った。しかし、この種の合金磁性材料は、
その固有抵抗値の低さに起因する高周波帯域での透磁率
の低下や、耐摩耗性が低いなどの問題がある。このため
、合金磁性材料からなる磁気へラドコアでは、両面にガ
ラスなどの非磁性材料とフェライトなどの酸化物磁性材
料とで形成された補強用コアを接着することによって合
金磁性材料の有する上記2つの問題点を回避することが
行なわれている。
Therefore, alloy magnetic materials such as Sendust amorphous metal, which has a high saturation magnetic flux density, have attracted attention as materials for magnetic heads. However, this kind of alloy magnetic material is
There are problems such as a decrease in magnetic permeability in a high frequency band due to its low specific resistance value and low wear resistance. For this reason, in a magnetic helad core made of an alloy magnetic material, reinforcing cores made of a non-magnetic material such as glass and an oxide magnetic material such as ferrite are bonded to both sides, thereby achieving the above two characteristics of the alloy magnetic material. Efforts are being made to avoid the problem.

〈発明が解決しようとする問題点〉 合金磁性材料からなる磁気へラドコアの両面に補強用コ
アを接着する構造は量産に不向きであり、生産性が低く
、コストアップになるという別の問題が生ずる。
<Problems to be solved by the invention> The structure in which reinforcing cores are adhered to both sides of a magnetic helad core made of an alloy magnetic material is not suitable for mass production, and other problems arise such as low productivity and increased costs. .

本発明は、この点を解決し、合金磁性材料の有する高透
磁率特性を兼ね備えた磁気ヘッドの量産化をはかること
を目的としてなされたものである。
The present invention was made with the aim of solving this problem and mass producing a magnetic head that combines the high magnetic permeability characteristics of an alloy magnetic material.

く問題点を解決するための手段〉 上記の目的を達成するため、本発明の磁気ヘッドチップ
の製造方法は、次のような工程となっている。即ち、高
周波帯域で高透磁率を有する酸化物磁性材料と耐摩耗性
を有する非磁性材料とが厚さ方向に対して直角な方向に
交互に積層された構造を備えた複合基板の片面に、高飽
和磁束密度を有する合金磁性材料の薄膜を形成した後、
前記複合基板の酸化物磁性材料と非磁性材料との境界に
沿って一つ置きに切断して、細長い複合材料ユニットと
し、この複合材料ユニットを前記複合基板の厚さ方向に
積層して板状の複合磁性材料ブロックから所定のアジマ
ス角度で一対の細長い複合磁性材料ピースを切り出し、
少なくとも一方の複合磁性材料ピースの酸化物磁性材料
と非磁性材料及び合金磁性材料とが露出している面に長
手方向に沿って巻線用溝と接合用溝を形成し、この而及
びこれに対応する他方の複合磁性材料ピースの面とに鏡
面研磨加工を施した後、ギャップ材となる非磁性材料の
薄膜を介して上記面同士を突き合わせて一対の複合磁性
材料ピースを相互に接合し、複合磁性材料ピースの酸化
物磁性材料と非磁性材料の部分で切断して個々の磁気ヘ
ッドチップを得るのである。
Means for Solving the Problems> In order to achieve the above object, the method for manufacturing a magnetic head chip of the present invention includes the following steps. That is, on one side of a composite substrate having a structure in which an oxide magnetic material having high magnetic permeability in a high frequency band and a non-magnetic material having wear resistance are alternately laminated in a direction perpendicular to the thickness direction, After forming a thin film of alloyed magnetic material with high saturation magnetic flux density,
The composite substrate is cut every other time along the boundary between the oxide magnetic material and the non-magnetic material to obtain elongated composite material units, and the composite material units are stacked in the thickness direction of the composite substrate to form a plate shape. A pair of elongated composite magnetic material pieces are cut out at a predetermined azimuth angle from the composite magnetic material block of
A winding groove and a bonding groove are formed along the longitudinal direction on the surface where the oxide magnetic material, the non-magnetic material, and the alloy magnetic material of at least one of the composite magnetic material pieces are exposed; After applying mirror polishing to the corresponding surface of the other composite magnetic material piece, the pair of composite magnetic material pieces are joined to each other by butting the surfaces with each other through a thin film of non-magnetic material serving as a gap material, The composite magnetic material piece is cut at the oxide magnetic material and nonmagnetic material portions to obtain individual magnetic head chips.

く作用〉 本発明によれば、酸化物磁性材料、非磁性材料、合金磁
性材料を得て、これから個々の磁気ヘッドチップが切り
出されるから、合金磁気材料に補強用コアを接着するよ
うな作業は不要であり、容易に量産化を図ることが可能
となる。
According to the present invention, since an oxide magnetic material, a non-magnetic material, and an alloy magnetic material are obtained and individual magnetic head chips are cut out from them, work such as gluing a reinforcing core to the alloy magnetic material is not necessary. This is not necessary and mass production can be easily achieved.

〈実施例〉 以下、図示の一実施例について、具体的に説明する。<Example> The illustrated embodiment will be specifically described below.

第1図は、得られた磁気ヘッドチップの斜視図、第2図
(a)乃至第2図(j)は、工程中における部材の斜視
図である。
FIG. 1 is a perspective view of the obtained magnetic head chip, and FIGS. 2(a) to 2(j) are perspective views of members during the process.

まず、単結晶フェライト基板1の表面に溝2を幅0.2
〜0.5[關]、深さ0.3〜0.5[鰭]の大きさで
平行に形成する(第2図(a)及び第2図(b)?照)
0次に、この講2に軟化点650〜750[”C]のp
bo系のガラス3を加熱処理により溶融させて流し込み
、硬化後、平面研磨と鏡面研磨加工を行なって平滑な面
4を形成しく第2図(c)参照)、更に、反対側の面の
単結晶フェライトの部分を研削し、単結晶フェライトl
aとガラス3とが厚さ方向に対して直角な方向に交互に
積層された状態の複合基板6を得る。(第2図(d)参
照)。
First, grooves 2 with a width of 0.2 are formed on the surface of a single crystal ferrite substrate 1.
Form parallel to each other with a size of ~0.5 [degree] and a depth of 0.3 to 0.5 [fin] (see Figure 2 (a) and Figure 2 (b)).
0 Next, in this lecture 2, p with a softening point of 650 to 750[''C]
BO-based glass 3 is melted by heat treatment and poured, and after hardening, surface polishing and mirror polishing are performed to form a smooth surface 4 (see Figure 2 (c)). Grind the crystal ferrite part and make single crystal ferrite l
A composite substrate 6 is obtained in which a and glass 3 are alternately laminated in a direction perpendicular to the thickness direction. (See Figure 2(d)).

次に、この複合基板6の平滑な面4に、スパッタリング
や蒸着などの方法により、センダストなどの高飽和磁束
密度を有する合金磁性材料の薄膜7を10〜60[μl
Il]の厚さで形成し、単結晶フェライト1aとガラス
3との境界に沿って一つ置きに切断し、断面が長方形の
細長い複合材料ユニット8を形成しく第2図(e)及び
第2図(f)参照第2図(e)の破線は切断面の位置を
示す)、次いで、この複金材料ユニット8を複合基板6
における厚さ方向に積層し、複合磁性材料プロ・7り9
を得る(第2図(g)参照)。
Next, on the smooth surface 4 of this composite substrate 6, 10 to 60 μl of a thin film 7 of an alloy magnetic material having a high saturation magnetic flux density, such as sendust, is applied by sputtering or vapor deposition.
Il] and cut every other unit along the boundary between the single crystal ferrite 1a and the glass 3 to form an elongated composite material unit 8 having a rectangular cross section. (See FIG. 2(f), the broken line in FIG. 2(e) indicates the position of the cut surface), then this composite gold material unit 8 is attached to the composite substrate 6.
Composite magnetic material Pro 7 Ri9 is laminated in the thickness direction.
(See Figure 2 (g)).

次に、複合磁性材料ブロック9より所定のアジマス角度
でピースユニット10を切り出した後、ギャップ突き合
わせ面11となる部分で切断し、一対の複合磁性材料ピ
ース12,12を得る(第2図(h)及び第2図(i)
参照、第2図(h)の破線は切断面を示す)、こうして
得られた複合磁性材料ピース12,12の突き合わせ面
11.11には、単結晶フェライト1aとガラス3及び
合金磁性材料薄膜7とが露出しており、少なくとも一方
の突き合わせ面11に長手方向に沿って巻線用?l11
3と接合用71114を形成する(第2図(i)参照)
0次に、それぞれの突き合わせ面11゜11を研磨し、
面粗度Rmax≦100[入コの鏡面加工を施した後、
これらの面出11にギヤ・ンブ材となる非磁性材料のS
 i O2やガラス(図示せず)などをスパッタリング
等の方法で0,15〜0.20[μ輪]の厚さで付着さ
せ、更に、面n、iiの個々の材料の位置を合わせて突
き合わせて適宜加圧する。そして、巻線用溝13と接合
用溝14にガラス3より軟化点の低いガラス、例えば軟
化点550〜650[’C]のpb。
Next, a piece unit 10 is cut out from the composite magnetic material block 9 at a predetermined azimuth angle, and then cut at a portion that will become the gap abutting surface 11 to obtain a pair of composite magnetic material pieces 12, 12 (Fig. 2 (h) ) and Figure 2(i)
(Refer to FIG. 2(h), the broken line indicates the cut surface.) On the abutting surfaces 11.11 of the thus obtained composite magnetic material pieces 12, 12, the single crystal ferrite 1a, the glass 3, and the alloy magnetic material thin film 7 are formed. is exposed along the longitudinal direction on at least one abutting surface 11. l11
3 and form 71114 for joining (see Fig. 2 (i))
0 Next, each abutting surface 11°11 was polished,
Surface roughness Rmax≦100 [After mirror finishing,
S of non-magnetic material that will become the gear member material is placed on these surface 11.
i O2, glass (not shown), etc. are deposited using a method such as sputtering to a thickness of 0.15 to 0.20 [μ ring], and the individual materials on surfaces n and ii are aligned and butted together. Apply pressure as appropriate. Then, the winding groove 13 and the bonding groove 14 are filled with glass having a softening point lower than that of the glass 3, for example, Pb having a softening point of 550 to 650 ['C].

系ガラス棒(図示せず)を挿入し、水素又は不活性ガス
中で加熱溶着処理を行ない、複合磁性材料ピース12.
12を相互に接合し、磁気ヘッドブロック15を得る(
第2図(j)参照)。
A glass rod (not shown) is inserted and heat welding is performed in hydrogen or inert gas to form a composite magnetic material piece 12.
12 to each other to obtain a magnetic head block 15 (
(See Figure 2 (j)).

この磁気ヘッドブロック15のガラス3側の面はテープ
摺接面17となる部分であり、この面を曲率半径5〜8
Rの曲面形状に加工した後、ガラス3の部分で切断して
第1図に示す磁気ヘッドチップ16を得る。この後、巻
線用溝13mを利用して巻線(図示せず)を施し、ヘッ
ドベースに固定することによつ−て磁気ヘッドが得られ
る。
The surface of the magnetic head block 15 on the glass 3 side becomes the tape sliding surface 17, and this surface has a radius of curvature of 5 to 8.
After processing into a curved surface shape of R, the magnetic head chip 16 shown in FIG. 1 is obtained by cutting at the glass 3 portion. Thereafter, a magnetic head is obtained by winding (not shown) using the winding groove 13m and fixing it to the head base.

こうして得られた磁気ヘッドチップ16は、合金磁性材
料の薄87の両面に単結晶フェライト1aが一体に設け
られており、テープ摺接面17の部分は、両面にガラス
3が一体に設けられている。従って、記録時には、合金
磁性材料の持つ高飽和磁束密度特性が有効に発揮され、
又、再生時には、補助コアである単結晶フェライトの持
つ高透磁率特性が有効に発揮されるため、記録と再生の
いずれの性能にも優れ、且つ、耐摩耗性を備えた磁気ヘ
ッドを得ることができる。又、ギャップ突き合わせ面は
、PbOガラスの加熱溶着によって一体化されているの
で機械的強度が大きく、この点からも高い信頼性が得ら
れる。
The thus obtained magnetic head chip 16 has single crystal ferrite 1a integrally provided on both sides of a thin alloy magnetic material 87, and glass 3 is integrally provided on both sides of the tape sliding surface 17. There is. Therefore, during recording, the high saturation magnetic flux density characteristics of the alloy magnetic material are effectively exhibited.
Furthermore, during playback, the high magnetic permeability properties of the single crystal ferrite that is the auxiliary core are effectively exhibited, so it is possible to obtain a magnetic head that is excellent in both recording and playback performance and has wear resistance. I can do it. Furthermore, since the gap abutting surfaces are integrated by heat welding of PbO glass, the mechanical strength is high, and from this point as well, high reliability can be obtained.

〈発明の効果〉 上述の実施例の説明からも明らかなように、本発明の磁
気ヘッドチップの製造方法によれば、酸化物磁性材料、
非磁性材料、合金磁性材料の三者が一体となった板状の
複合磁性材料ブロックから、合金磁性材料に補助コアが
一体化された状態で個々の磁気ヘッドチップを切り出し
ている。従って、合金磁気材料に補助用コアを接着する
ような工程は不要で、量産に適しており、合金磁性材料
の高飽和磁束密度特性と酸化物磁性材料の高透磁率特性
を兼ね備えた高透磁率特性を兼ね備えた高性能磁気ヘッ
ドを低コストで生産することができるのである。
<Effects of the Invention> As is clear from the description of the above embodiments, according to the method for manufacturing a magnetic head chip of the present invention, an oxide magnetic material,
Individual magnetic head chips are cut out from a plate-shaped composite magnetic material block in which a non-magnetic material and an alloy magnetic material are integrated, with an auxiliary core integrated into the alloy magnetic material. Therefore, there is no need for the process of bonding the auxiliary core to the alloy magnetic material, making it suitable for mass production. A high-performance magnetic head with these characteristics can be produced at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の一実施例により得られた磁気ヘッド
チップの斜視図、 第2図(a) (b) (c) (d) (e) (f
 )(g) (h) (i )(j)は、本発明の一実
施例の工程説明図である。 1・・・単結晶フェライト基板 1a・・・単結晶フェライト 3・・・ガラス 、 6・・・複合基板7・・・合金磁
性材料薄膜 8・・・複合材料ユニット 9・・・複合磁性材料ブロック 11・・・突き合わせ面 12・・・複合磁性材料ピース 13・・・巻線用溝 、14・・・接合用溝16・・・
磁気ヘッドチップ 17・・・テープ摺接面
FIG. 1 is a perspective view of a magnetic head chip obtained according to an embodiment of the present invention, and FIG.
)(g)(h)(i)(j) are process explanatory diagrams of one embodiment of the present invention. 1... Single crystal ferrite substrate 1a... Single crystal ferrite 3... Glass, 6... Composite substrate 7... Alloy magnetic material thin film 8... Composite material unit 9... Composite magnetic material block 11... Butt surface 12... Composite magnetic material piece 13... Winding groove, 14... Joining groove 16...
Magnetic head chip 17... Tape sliding contact surface

Claims (1)

【特許請求の範囲】[Claims] (1)高周波帯域で高透磁率を有する酸化物磁性材料と
耐摩耗性を有する非磁性材料とが厚さ方向に対して直角
な方向に交互に積層された構造を備えた複合基板の片面
に、高飽和磁束密度を有する合金磁性材料の薄膜を形成
した後、前記複合基板の酸化物磁性材料と非磁性材料と
の境界に沿って一つ置きに切断して細長い複合材料ユニ
ットとし、この複合材料ユニットを前記複合基板の厚さ
方向に積層して板状の複合磁性材料ブロックを形成した
後、この複合磁性材料ブロックから所定のアジマス角度
で一対の細長い複合磁性材料ピースを切り出し、少なく
とも一方の複合磁性材料ピースの酸化物磁性材料と非磁
性材料及び合金磁性材料とが露出している面に長手方向
に沿って巻線用溝と接合用溝を形成し、この面及びこれ
に対応する他方の複合磁性材料ピースの面とに鏡面研磨
加工を施した後、ギャップ材となる非磁性材料の薄膜を
介して上記面同士を突き合わせて一対の複合磁性材料ピ
ースを相互に複合し、複合磁性材料ピースの酸化物磁性
材料と非磁性材料の切断して個々の磁気ヘッドチップを
得ることを特徴とする磁気ヘッドチップの製造方法。
(1) On one side of a composite substrate with a structure in which an oxide magnetic material with high magnetic permeability in a high frequency band and a non-magnetic material with wear resistance are alternately laminated in a direction perpendicular to the thickness direction. , after forming a thin film of alloy magnetic material with high saturation magnetic flux density, cut every other composite substrate along the boundary between oxide magnetic material and non-magnetic material to obtain elongated composite material units; After forming a plate-shaped composite magnetic material block by laminating material units in the thickness direction of the composite substrate, a pair of elongated composite magnetic material pieces are cut out from this composite magnetic material block at a predetermined azimuth angle, and at least one of the Winding grooves and bonding grooves are formed along the longitudinal direction on the surface where the oxide magnetic material, non-magnetic material, and alloy magnetic material of the composite magnetic material piece are exposed, and this surface and the other corresponding surface are formed. After performing mirror polishing on the surfaces of the composite magnetic material pieces, the surfaces are butted against each other through a thin film of non-magnetic material serving as a gap material, and the pair of composite magnetic material pieces are combined with each other to form a composite magnetic material. A method for manufacturing a magnetic head chip, comprising cutting pieces of oxide magnetic material and non-magnetic material to obtain individual magnetic head chips.
JP19692385A 1985-09-05 1985-09-05 Production of magnetic head chip Pending JPS6257112A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19692385A JPS6257112A (en) 1985-09-05 1985-09-05 Production of magnetic head chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19692385A JPS6257112A (en) 1985-09-05 1985-09-05 Production of magnetic head chip

Publications (1)

Publication Number Publication Date
JPS6257112A true JPS6257112A (en) 1987-03-12

Family

ID=16365915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19692385A Pending JPS6257112A (en) 1985-09-05 1985-09-05 Production of magnetic head chip

Country Status (1)

Country Link
JP (1) JPS6257112A (en)

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