JPS625400B2 - - Google Patents
Info
- Publication number
- JPS625400B2 JPS625400B2 JP54122883A JP12288379A JPS625400B2 JP S625400 B2 JPS625400 B2 JP S625400B2 JP 54122883 A JP54122883 A JP 54122883A JP 12288379 A JP12288379 A JP 12288379A JP S625400 B2 JPS625400 B2 JP S625400B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- ultrasonic
- piezoelectric
- curved surface
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000000523 sample Substances 0.000 description 22
- 238000010586 diagram Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000003745 diagnosis Methods 0.000 description 4
- 238000002604 ultrasonography Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、超音波探傷や超音波診断等に用いら
れる超音波探触子の製造方法に関し、特に曲面に
配列される超音波探触子の製造方法に関する。Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a method for manufacturing an ultrasonic probe used in ultrasonic flaw detection, ultrasonic diagnosis, etc., and particularly relates to an ultrasonic probe arranged on a curved surface. Relating to a manufacturing method.
（従来の技術）
従来より、超音波探傷や超音波診断等に超音波
探触子が広く用いられている。(Prior Art) Ultrasonic probes have been widely used for ultrasonic flaw detection, ultrasonic diagnosis, and the like.
超音波探触子は、電気信号で励振して超音波信
号を発生し、又はその逆に、超音波信号で励振し
て電気信号を発生する、即ち、超音波信号を送受
する圧電素子を利用したものである。 An ultrasonic probe uses a piezoelectric element that is excited by an electrical signal to generate an ultrasonic signal, or vice versa, that is excited by an ultrasonic signal to generate an electrical signal, that is, it transmits and receives ultrasonic signals. This is what I did.
従来、この超音波探傷や超音波診断に用いられ
る超音波探触子は第１図Ａ，Ｂに示す構成であつ
た。 Conventionally, ultrasonic probes used for ultrasonic flaw detection and ultrasonic diagnosis have had the configurations shown in FIGS. 1A and 1B.
即ち、両面に電極を有する短冊形の圧電振動子
３−１〜３−ｎを、自由振動を制動するダンパー
（又は保持台）１に接着層２を介し線形に配設し
て構成される。 That is, rectangular piezoelectric vibrators 3-1 to 3-n having electrodes on both sides are linearly disposed via an adhesive layer 2 on a damper (or holding stand) 1 for damping free vibration.
（発明が解決しようとする問題点）
この構成のものは、いわゆる線形配列探触子と
称され、各圧電振動子を電子的に切換えて走査
し、被検体の２次的な画像（Ｂスコープ）を得る
ものである。(Problems to be Solved by the Invention) This configuration is called a linear array probe, and each piezoelectric vibrator is electronically switched and scanned to create a secondary image of the subject (B scope). ).
しかし、探傷や診断の能率の向上化及び適確な
画像を得るために圧電振動子の配列を凸又は凹面
に配列する必要が生じている。 However, in order to improve the efficiency of flaw detection and diagnosis and to obtain accurate images, it has become necessary to arrange piezoelectric vibrators on a convex or concave surface.
第２図は、係る凸面配列探触子の断面図を示し
ている。 FIG. 2 shows a cross-sectional view of such a convex array probe.
前述の如くダンパー１′は曲凸面を有し、曲面
上に接着層２を介し圧電振動子３−１〜３−ｎを
配列して構成される。圧電振動子３−１〜３−ｎ
を前述の短冊形のものを用いると、振動子３−１
〜３−ｎの内側（曲面側）と外側の内周が異な
り、外側の隙間が大きくあいてしまう。 As described above, the damper 1' has a curved convex surface, and the piezoelectric vibrators 3-1 to 3-n are arranged on the curved surface with the adhesive layer 2 interposed therebetween. Piezoelectric vibrators 3-1 to 3-n
If the above-mentioned rectangular one is used, the transducer 3-1
The inner periphery of the inner side (curved surface side) and the outer side of ~3-n are different, resulting in a large gap on the outside.
逆に凹面のダンパーでは、内側に大きな隙間が
あいてしまうことになる。 Conversely, with a concave damper, there will be a large gap on the inside.
このことは、圧電振動子の有効面積が減少し、
能率が低下することを意味する。 This reduces the effective area of the piezoelectric vibrator and
This means that efficiency will decrease.
本発明は、上述の欠点を改善し、圧電振動子の
有効面積を減少することのない、従つて能率が低
下することのない新規なる超音波探触子の製造方
法を提供することを目的とする。 SUMMARY OF THE INVENTION The present invention aims to improve the above-mentioned drawbacks and to provide a novel method for manufacturing an ultrasound probe that does not reduce the effective area of the piezoelectric transducer and therefore does not reduce efficiency. do.
（問題点を解決するための手段）
本発明によれば、曲面を有するベースに圧電振
動子層を設ける工程と、この圧電振動子層をベー
スの曲面の中心に向つて一定幅の切断除去して複
数の振動子に切断分離する工程とからなり、前記
ベース上に複数の扇形又は大径の振動子を形成す
ることを特徴とする超音波探触子の製造方法が提
供される。(Means for Solving the Problems) According to the present invention, a piezoelectric vibrator layer is provided on a base having a curved surface, and the piezoelectric vibrator layer is cut and removed in a certain width toward the center of the curved surface of the base. There is provided a method for manufacturing an ultrasonic probe, which comprises a step of cutting and separating the transducers into a plurality of transducers using the base, and forming a plurality of fan-shaped or large-diameter transducers on the base.
（作用）
本発明方法では、曲面を有するベースに設けた
圧電振動子層を切断するのみで、圧電振動子を凸
又は凹面に配列した能率の良い探触子が簡単に製
造できる。(Function) According to the method of the present invention, an efficient probe in which piezoelectric vibrators are arranged on a convex or concave surface can be easily manufactured by simply cutting the piezoelectric vibrator layer provided on a base having a curved surface.
（実施例）
以下、本発明を実施例に基づいて詳細に説明す
る。(Examples) Hereinafter, the present invention will be explained in detail based on Examples.
第３図は本発明に係る超音波探触子の圧電振動
子の構成図である。 FIG. 3 is a configuration diagram of a piezoelectric vibrator of an ultrasonic probe according to the present invention.
個々の圧電振動子４は第３図Ａの断面図の如く
扇形の形状をなしている。扇形の内周は前述のダ
ンパーの曲面に合せて選ばれる。扇形の内周及び
外周には電極５′及び５が設けられる。第３図Ｂ
は個々の圧電振動子４の斜視図である。このよう
な扇形の構成により、外周W1が内周W2より長く
なる。 Each piezoelectric vibrator 4 has a fan-shaped shape as shown in the cross-sectional view of FIG. 3A. The inner circumference of the sector is selected to match the curved surface of the damper described above. Electrodes 5' and 5 are provided on the inner and outer peripheries of the sector. Figure 3B
1 is a perspective view of an individual piezoelectric vibrator 4. FIG. Due to such a fan-shaped configuration, the outer circumference W 1 is longer than the inner circumference W 2 .
第４図は本発明に係る超音波探触子の圧電振動
子の断面図である。 FIG. 4 is a sectional view of a piezoelectric vibrator of an ultrasound probe according to the present invention.
ここでは、圧電振動子４は台形をなしている。 Here, the piezoelectric vibrator 4 has a trapezoidal shape.
上記２つの圧電振動子４においては、第３図及
び第４図の如く、扇形及び台形の外周幅W1と内
周幅W2の和と、振動子の厚みｔとが、
W1＋W2＜2t
なる関係を満足する構成とすることで、振動子の
厚み方向の振動モードを他の振動モードに比べて
強大にすることができる。 In the above two piezoelectric vibrators 4, as shown in FIGS. 3 and 4, the sum of the outer circumferential width W 1 and the inner circumferential width W 2 of the fan-shaped and trapezoidal shapes, and the thickness t of the vibrator are W 1 +W 2 By adopting a configuration that satisfies the relationship <2t, the vibration mode in the thickness direction of the vibrator can be made stronger than other vibration modes.
このように構成された圧電振動子は曲面に合わ
せてダンパー上に設けられる。 The piezoelectric vibrator configured in this manner is provided on the damper in accordance with the curved surface.
第５図は本発明に係る超音波探触子の構成図を
示している。 FIG. 5 shows a configuration diagram of an ultrasonic probe according to the present invention.
ダンパー１は曲凸面を構成しているので、第３
図圧電振動子４の内側（電極５′側）をダンパー
１の曲凸面に合わせて設ける。 Since the damper 1 has a curved convex surface, the third
The inside of the piezoelectric vibrator 4 (electrode 5' side) is provided so as to match the curved convex surface of the damper 1.
逆に、ダンパー１が曲凹面なら、第３図圧電振
動子４の外側（電極５側）をダンパー１の曲凹面
に合わせて設ける。 Conversely, if the damper 1 has a curved concave surface, the outside (electrode 5 side) of the piezoelectric vibrator 4 shown in FIG. 3 is provided so as to match the curved concave surface of the damper 1.
第４図の台形形状の圧電振動子の場合も同様で
ある。 The same applies to the trapezoidal piezoelectric vibrator shown in FIG.
このように構成することにより、曲面を有する
ベース（ダンパー）上での各圧電振動子間の外周
隙間が最小となり、即ち、圧電振動子の有効振動
面積が大きくなり、能率を向上することができ
る。また、振動子の厚み方向の振動モードを他の
振動モードに比べて強大にすることができるた
め、所望の縦振動を容易に得ることができる。 With this configuration, the outer circumferential gap between each piezoelectric vibrator on the base (damper) having a curved surface is minimized, that is, the effective vibration area of the piezoelectric vibrator is increased, and efficiency can be improved. . Further, since the vibration mode in the thickness direction of the vibrator can be made stronger than other vibration modes, desired longitudinal vibration can be easily obtained.
次に、このような超音波探触子の製造方法につ
いて説明する。 Next, a method for manufacturing such an ultrasonic probe will be explained.
例えば、円形配列の探触子を製造する際には、
先ず、円曲面のダンパーの曲面上に接着層を介し
圧電振動子層を形成する。 For example, when manufacturing a circular array of probes,
First, a piezoelectric vibrator layer is formed on the curved surface of a circularly curved damper via an adhesive layer.
次に、第５図のダンパーの曲面の中心Ｏに向つ
て、圧電振動子層を切断し、第５図の構成を得
る。 Next, the piezoelectric vibrator layer is cut toward the center O of the curved surface of the damper shown in FIG. 5 to obtain the structure shown in FIG.
このように、本発明方法によれば超音波探触子
を容易に製造することができる。 As described above, according to the method of the present invention, an ultrasonic probe can be easily manufactured.
この場合、勿論、前述のW1＋W2＜2tを満たす
ように切断すれば、更に良い。 In this case, it is of course better to cut so that the above-mentioned W 1 +W 2 <2t is satisfied.
尚、前述の説明では、凹凸面を曲面で述べた
が、他の形状の面でも採用しうる。 In the above description, the uneven surface was described as a curved surface, but surfaces of other shapes may also be used.
尚、本発明は、その主旨の範囲で種々の変形が
可能であり、これらを本発明の範囲から除外する
ものではない。 It should be noted that the present invention can be modified in various ways within the scope of its spirit, and these modifications are not excluded from the scope of the present invention.
（発明の効果）
以上の様に、本発明の製造方法によれば、ベー
スの中心に向つて圧電振動子層を切断するのみで
済むため、極めて容易に、能率の低下することの
ない超音波探触子を製造できる。(Effects of the Invention) As described above, according to the manufacturing method of the present invention, it is only necessary to cut the piezoelectric vibrator layer toward the center of the base. Probes can be manufactured.
第１図は従来の超音波探触子構成図、第２図は
本発明の基となる凸面配列探触子構成図、第３図
は本発明に係る超音波探触子の圧電振動子の構成
図、第４図は本発明に係る超音波探触子の圧電振
動子の断面図、第５図は本発明に係る超音波探触
子の構成図である。
１，１′……ダンパー（ベース）、２……接着
層、３−１〜３−ｎ，４……圧電振動子、５，
５′……電極。
Fig. 1 is a block diagram of a conventional ultrasonic probe, Fig. 2 is a block diagram of a convex array probe which is the basis of the present invention, and Fig. 3 is a block diagram of a piezoelectric vibrator of an ultrasonic probe according to the present invention. FIG. 4 is a cross-sectional view of a piezoelectric vibrator of an ultrasonic probe according to the present invention, and FIG. 5 is a block diagram of the ultrasonic probe according to the present invention. 1, 1'... Damper (base), 2... Adhesive layer, 3-1 to 3-n, 4... Piezoelectric vibrator, 5,
5'...electrode.
Claims (1)
工程と、この圧電振動子層をベースの曲面の中心
に向つて一定幅の切断除去して複数の振動子に切
断分離する工程とからなり、前記ベース上に複数
の扇形又は台形の振動子を形成することを特徴と
する超音波接触子の製造方法。 ２ 切断分離する工程における各振動子は、その
外周幅W1と内周幅W2の和と、振動子の圧みｔと
が、 W1＋W2＜2t なる関係を満たすように形成されることを特徴と
する特許請求の範囲第１項記載の超音波接触子の
製造方法。[Claims] 1. A step of providing a piezoelectric vibrator layer on a base having a curved surface, and cutting and removing the piezoelectric vibrator layer in a certain width toward the center of the curved surface of the base to separate the piezoelectric vibrators into a plurality of vibrators. A method for manufacturing an ultrasonic contactor, comprising the steps of: forming a plurality of fan-shaped or trapezoidal vibrators on the base. 2. Each vibrator in the cutting and separating process is formed such that the sum of its outer peripheral width W 1 and inner peripheral width W 2 and the pressure t of the vibrator satisfy the relationship W 1 + W 2 <2t. A method of manufacturing an ultrasonic contactor according to claim 1, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12288379A JPS5646390A (en) | 1979-09-25 | 1979-09-25 | Construction of ultrasonic wave probe and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12288379A JPS5646390A (en) | 1979-09-25 | 1979-09-25 | Construction of ultrasonic wave probe and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5646390A JPS5646390A (en) | 1981-04-27 |
| JPS625400B2 true JPS625400B2 (en) | 1987-02-04 |
Family
ID=14846987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12288379A Granted JPS5646390A (en) | 1979-09-25 | 1979-09-25 | Construction of ultrasonic wave probe and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5646390A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5937214Y2 (en) * | 1979-11-02 | 1984-10-15 | 株式会社富士通ゼネラル | Ultrasonic diagnostic probe |
| JPS5711648A (en) * | 1980-06-27 | 1982-01-21 | Matsushita Electric Ind Co Ltd | Ultrasonic probe |
| JPS5891157U (en) * | 1981-12-15 | 1983-06-20 | 三菱電機株式会社 | Ultrasonic array transducer |
-
1979
- 1979-09-25 JP JP12288379A patent/JPS5646390A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5646390A (en) | 1981-04-27 |
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