JPS6251649U - - Google Patents
Info
- Publication number
- JPS6251649U JPS6251649U JP14324885U JP14324885U JPS6251649U JP S6251649 U JPS6251649 U JP S6251649U JP 14324885 U JP14324885 U JP 14324885U JP 14324885 U JP14324885 U JP 14324885U JP S6251649 U JPS6251649 U JP S6251649U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust hole
- electrodes
- electrostatic lens
- einzel
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14324885U JPS6251649U (xx) | 1985-09-18 | 1985-09-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14324885U JPS6251649U (xx) | 1985-09-18 | 1985-09-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6251649U true JPS6251649U (xx) | 1987-03-31 |
Family
ID=31052750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14324885U Pending JPS6251649U (xx) | 1985-09-18 | 1985-09-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6251649U (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001345260A (ja) * | 2000-03-31 | 2001-12-14 | Canon Inc | 電子光学系アレイ及びその製造方法、荷電粒子線露光装置、並びに、デバイスの製造方法 |
-
1985
- 1985-09-18 JP JP14324885U patent/JPS6251649U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001345260A (ja) * | 2000-03-31 | 2001-12-14 | Canon Inc | 電子光学系アレイ及びその製造方法、荷電粒子線露光装置、並びに、デバイスの製造方法 |