JPS6250725U - - Google Patents

Info

Publication number
JPS6250725U
JPS6250725U JP14070985U JP14070985U JPS6250725U JP S6250725 U JPS6250725 U JP S6250725U JP 14070985 U JP14070985 U JP 14070985U JP 14070985 U JP14070985 U JP 14070985U JP S6250725 U JPS6250725 U JP S6250725U
Authority
JP
Japan
Prior art keywords
gas
vacuum
atmosphere
container
small amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14070985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517144Y2 (US07655688-20100202-C00086.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14070985U priority Critical patent/JPH0517144Y2/ja
Publication of JPS6250725U publication Critical patent/JPS6250725U/ja
Application granted granted Critical
Publication of JPH0517144Y2 publication Critical patent/JPH0517144Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Chemical Vapour Deposition (AREA)
JP14070985U 1985-09-17 1985-09-17 Expired - Lifetime JPH0517144Y2 (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14070985U JPH0517144Y2 (US07655688-20100202-C00086.png) 1985-09-17 1985-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14070985U JPH0517144Y2 (US07655688-20100202-C00086.png) 1985-09-17 1985-09-17

Publications (2)

Publication Number Publication Date
JPS6250725U true JPS6250725U (US07655688-20100202-C00086.png) 1987-03-30
JPH0517144Y2 JPH0517144Y2 (US07655688-20100202-C00086.png) 1993-05-10

Family

ID=31047813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14070985U Expired - Lifetime JPH0517144Y2 (US07655688-20100202-C00086.png) 1985-09-17 1985-09-17

Country Status (1)

Country Link
JP (1) JPH0517144Y2 (US07655688-20100202-C00086.png)

Also Published As

Publication number Publication date
JPH0517144Y2 (US07655688-20100202-C00086.png) 1993-05-10

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