JPS6248186B2 - - Google Patents

Info

Publication number
JPS6248186B2
JPS6248186B2 JP53016769A JP1676978A JPS6248186B2 JP S6248186 B2 JPS6248186 B2 JP S6248186B2 JP 53016769 A JP53016769 A JP 53016769A JP 1676978 A JP1676978 A JP 1676978A JP S6248186 B2 JPS6248186 B2 JP S6248186B2
Authority
JP
Japan
Prior art keywords
sample
signal
output
electron beam
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53016769A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54109897A (en
Inventor
Tadashi Watanabe
Jun Suzumi
Kyoshi Harasawa
Yoshiaki Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP1676978A priority Critical patent/JPS54109897A/ja
Publication of JPS54109897A publication Critical patent/JPS54109897A/ja
Publication of JPS6248186B2 publication Critical patent/JPS6248186B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP1676978A 1978-02-16 1978-02-16 Specimen analytical apparatus in scanning electron microscope or the like Granted JPS54109897A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1676978A JPS54109897A (en) 1978-02-16 1978-02-16 Specimen analytical apparatus in scanning electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1676978A JPS54109897A (en) 1978-02-16 1978-02-16 Specimen analytical apparatus in scanning electron microscope or the like

Publications (2)

Publication Number Publication Date
JPS54109897A JPS54109897A (en) 1979-08-28
JPS6248186B2 true JPS6248186B2 (en:Method) 1987-10-13

Family

ID=11925416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1676978A Granted JPS54109897A (en) 1978-02-16 1978-02-16 Specimen analytical apparatus in scanning electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS54109897A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06109370A (ja) * 1992-09-25 1994-04-19 Mitsubishi Electric Corp 直流式黒鉛化炉

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH028199Y2 (en:Method) * 1980-05-30 1990-02-27
JP2542569B2 (ja) * 1985-05-17 1996-10-09 株式会社島津製作所 Ｘ線光電子分光装置
JPH0712755A (ja) * 1993-06-23 1995-01-17 Res Dev Corp Of Japan 電子線装置の調整方法および装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121891A (en:Method) * 1974-08-14 1976-02-21 Tokyo Shibaura Electric Co

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06109370A (ja) * 1992-09-25 1994-04-19 Mitsubishi Electric Corp 直流式黒鉛化炉

Also Published As

Publication number Publication date
JPS54109897A (en) 1979-08-28

Similar Documents

Publication Publication Date Title
JPH0352178B2 (en:Method)
JPH09184715A (ja) パターン形状検査装置
US20170038321A1 (en) Analyzing an object using a particle beam apparatus
JPH0562638A (ja) 集束イオンビーム装置
JP2021093336A (ja) 画像調整方法および荷電粒子ビームシステム
JPS6248186B2 (en:Method)
US11404242B2 (en) Charged particle beam device and method for setting condition in charged particle beam device
JP2002286663A (ja) 試料分析および試料観察装置
JP2683951B2 (ja) 断面観察用走査型電子顕微鏡およびそれを用いた断面観察方法
US9859092B2 (en) Particle beam microscope and method for operating a particle beam microscope
JP2787299B2 (ja) 荷電粒子線装置
JPH07161327A (ja) 荷電粒子ビーム装置における焦点合わせ方法
JP2502050B2 (ja) 電子線マイクロアナライザ
JPH1167138A (ja) 微小領域観察装置
KR830002115B1 (ko) 입자선을 사용한 시료분석 장치
JPH07161331A (ja) 集束イオンビーム装置における質量分析方法
WO2025210811A1 (ja) 荷電粒子線装置、および画像評価条件調整方法
JPH0765772A (ja) イオンビーム加工装置
JPH09204892A (ja) 荷電粒子ビーム装置における焦点合わせ方法
JPS633258B2 (en:Method)
JPH11233058A (ja) 電子顕微鏡
JPH0668830A (ja) 走査電子顕微鏡における輝度補正方法
JP2000292384A (ja) 試料分析方法および電子線分析装置
JP2004158367A (ja) 電子顕微鏡、電子顕微鏡の観察像表示方法、電子顕微鏡の観察像表示プログラムおよびコンピュータで読み取り可能な記録媒体
JPS629218B2 (en:Method)