JPS6247124U - - Google Patents

Info

Publication number
JPS6247124U
JPS6247124U JP13848985U JP13848985U JPS6247124U JP S6247124 U JPS6247124 U JP S6247124U JP 13848985 U JP13848985 U JP 13848985U JP 13848985 U JP13848985 U JP 13848985U JP S6247124 U JPS6247124 U JP S6247124U
Authority
JP
Japan
Prior art keywords
wafer
thermocouple
back surface
spring
urged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13848985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13848985U priority Critical patent/JPS6247124U/ja
Publication of JPS6247124U publication Critical patent/JPS6247124U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13848985U 1985-09-10 1985-09-10 Pending JPS6247124U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13848985U JPS6247124U (US07922777-20110412-C00004.png) 1985-09-10 1985-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13848985U JPS6247124U (US07922777-20110412-C00004.png) 1985-09-10 1985-09-10

Publications (1)

Publication Number Publication Date
JPS6247124U true JPS6247124U (US07922777-20110412-C00004.png) 1987-03-23

Family

ID=31043518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13848985U Pending JPS6247124U (US07922777-20110412-C00004.png) 1985-09-10 1985-09-10

Country Status (1)

Country Link
JP (1) JPS6247124U (US07922777-20110412-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8191792B2 (en) 2006-07-06 2012-06-05 Komatsu Ltd. Temperature sensor, temperature control device, temperature controller and temperature-control method
JP2012181870A (ja) * 2006-07-06 2012-09-20 Komatsu Ltd 温度制御装置および温度制御方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8191792B2 (en) 2006-07-06 2012-06-05 Komatsu Ltd. Temperature sensor, temperature control device, temperature controller and temperature-control method
JP2012181870A (ja) * 2006-07-06 2012-09-20 Komatsu Ltd 温度制御装置および温度制御方法

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