JPS6244332Y2 - - Google Patents

Info

Publication number
JPS6244332Y2
JPS6244332Y2 JP1981078950U JP7895081U JPS6244332Y2 JP S6244332 Y2 JPS6244332 Y2 JP S6244332Y2 JP 1981078950 U JP1981078950 U JP 1981078950U JP 7895081 U JP7895081 U JP 7895081U JP S6244332 Y2 JPS6244332 Y2 JP S6244332Y2
Authority
JP
Japan
Prior art keywords
light
scale
lens
diffraction grating
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981078950U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57192419U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981078950U priority Critical patent/JPS6244332Y2/ja
Publication of JPS57192419U publication Critical patent/JPS57192419U/ja
Application granted granted Critical
Publication of JPS6244332Y2 publication Critical patent/JPS6244332Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP1981078950U 1981-05-29 1981-05-29 Expired JPS6244332Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981078950U JPS6244332Y2 (enEXAMPLES) 1981-05-29 1981-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981078950U JPS6244332Y2 (enEXAMPLES) 1981-05-29 1981-05-29

Publications (2)

Publication Number Publication Date
JPS57192419U JPS57192419U (enEXAMPLES) 1982-12-06
JPS6244332Y2 true JPS6244332Y2 (enEXAMPLES) 1987-11-21

Family

ID=29874564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981078950U Expired JPS6244332Y2 (enEXAMPLES) 1981-05-29 1981-05-29

Country Status (1)

Country Link
JP (1) JPS6244332Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8616240D0 (en) * 1986-07-03 1986-08-13 Renishaw Plc Opto-electronic scale reading apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6128923A (ja) * 1984-07-20 1986-02-08 Harue Sugimoto コンピユ−タ−端末機操作用メガネ

Also Published As

Publication number Publication date
JPS57192419U (enEXAMPLES) 1982-12-06

Similar Documents

Publication Publication Date Title
JP3028716B2 (ja) 光学式変位センサ
JP2586120B2 (ja) エンコーダー
JP3210111B2 (ja) 変位検出装置
US7154609B2 (en) Interferential position measuring arrangement
JP3254737B2 (ja) エンコーダー
US4091281A (en) Light modulation system
US5390022A (en) Displacement information detection apparatus for receiving a divergent light beam
JPH06194123A (ja) 変位検出装置
JPH07119854B2 (ja) 集積光学素子を備えた光ビームの入出射装置
US5113071A (en) Encoder in which single light source projects dual beams onto grating
JPH046884B2 (enEXAMPLES)
JPS6244332Y2 (enEXAMPLES)
JP3513251B2 (ja) 光学式変位センサ
JPH06174424A (ja) 測長または測角装置
JPS6128923B2 (enEXAMPLES)
JPS59163517A (ja) 光学式スケ−ル読取装置
JP2557967B2 (ja) 格子干渉型変位計
JPS6139289Y2 (enEXAMPLES)
JPS6234246Y2 (enEXAMPLES)
JPH0599638A (ja) 測角装置
JPS628489Y2 (enEXAMPLES)
JPS6210641Y2 (enEXAMPLES)
JPS6122243Y2 (enEXAMPLES)
JPS6139290Y2 (enEXAMPLES)
JPH0337126B2 (enEXAMPLES)