JPS6242044U - - Google Patents

Info

Publication number
JPS6242044U
JPS6242044U JP13259885U JP13259885U JPS6242044U JP S6242044 U JPS6242044 U JP S6242044U JP 13259885 U JP13259885 U JP 13259885U JP 13259885 U JP13259885 U JP 13259885U JP S6242044 U JPS6242044 U JP S6242044U
Authority
JP
Japan
Prior art keywords
sensor
water leakage
cooling water
operates
drain pan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13259885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13259885U priority Critical patent/JPS6242044U/ja
Publication of JPS6242044U publication Critical patent/JPS6242044U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP13259885U 1985-08-30 1985-08-30 Pending JPS6242044U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13259885U JPS6242044U (US20100056889A1-20100304-C00004.png) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13259885U JPS6242044U (US20100056889A1-20100304-C00004.png) 1985-08-30 1985-08-30

Publications (1)

Publication Number Publication Date
JPS6242044U true JPS6242044U (US20100056889A1-20100304-C00004.png) 1987-03-13

Family

ID=31032136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13259885U Pending JPS6242044U (US20100056889A1-20100304-C00004.png) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPS6242044U (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160071848A (ko) * 2014-12-12 2016-06-22 (주)울텍 전자빔 증착 장치의 누수 감지 구조

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160071848A (ko) * 2014-12-12 2016-06-22 (주)울텍 전자빔 증착 장치의 누수 감지 구조

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