JPS6238532U - - Google Patents

Info

Publication number

JPS6238532U

JPS6238532U JP12953685U JP12953685U JPS6238532U JP S6238532 U JPS6238532 U JP S6238532U JP 12953685 U JP12953685 U JP 12953685U JP 12953685 U JP12953685 U JP 12953685U JP S6238532 U JPS6238532 U JP S6238532U

Authority

JP

Japan

Prior art keywords

storage chamber

sound absorbing

chamber

clean room

air purification

Prior art date

1985-08-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011358 absorbing material Substances 0.000 claims 2
• 238000004887 air purification Methods 0.000 claims 2
• 238000010521 absorption reaction Methods 0.000 claims 1
• 238000009423 ventilation Methods 0.000 claims 1