JPS6237922U - - Google Patents

Info

Publication number
JPS6237922U
JPS6237922U JP12975085U JP12975085U JPS6237922U JP S6237922 U JPS6237922 U JP S6237922U JP 12975085 U JP12975085 U JP 12975085U JP 12975085 U JP12975085 U JP 12975085U JP S6237922 U JPS6237922 U JP S6237922U
Authority
JP
Japan
Prior art keywords
electrode
chamber
substrate
plasma cvd
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12975085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12975085U priority Critical patent/JPS6237922U/ja
Publication of JPS6237922U publication Critical patent/JPS6237922U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP12975085U 1985-08-26 1985-08-26 Pending JPS6237922U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12975085U JPS6237922U (US20030199744A1-20031023-C00003.png) 1985-08-26 1985-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12975085U JPS6237922U (US20030199744A1-20031023-C00003.png) 1985-08-26 1985-08-26

Publications (1)

Publication Number Publication Date
JPS6237922U true JPS6237922U (US20030199744A1-20031023-C00003.png) 1987-03-06

Family

ID=31026602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12975085U Pending JPS6237922U (US20030199744A1-20031023-C00003.png) 1985-08-26 1985-08-26

Country Status (1)

Country Link
JP (1) JPS6237922U (US20030199744A1-20031023-C00003.png)

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