JPS6236530U - - Google Patents

Info

Publication number
JPS6236530U
JPS6236530U JP12647285U JP12647285U JPS6236530U JP S6236530 U JPS6236530 U JP S6236530U JP 12647285 U JP12647285 U JP 12647285U JP 12647285 U JP12647285 U JP 12647285U JP S6236530 U JPS6236530 U JP S6236530U
Authority
JP
Japan
Prior art keywords
oven
inert gas
semiconductor wafers
furnace
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12647285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12647285U priority Critical patent/JPS6236530U/ja
Publication of JPS6236530U publication Critical patent/JPS6236530U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP12647285U 1985-08-21 1985-08-21 Pending JPS6236530U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12647285U JPS6236530U (US20030199744A1-20031023-C00003.png) 1985-08-21 1985-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12647285U JPS6236530U (US20030199744A1-20031023-C00003.png) 1985-08-21 1985-08-21

Publications (1)

Publication Number Publication Date
JPS6236530U true JPS6236530U (US20030199744A1-20031023-C00003.png) 1987-03-04

Family

ID=31020302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12647285U Pending JPS6236530U (US20030199744A1-20031023-C00003.png) 1985-08-21 1985-08-21

Country Status (1)

Country Link
JP (1) JPS6236530U (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006253517A (ja) * 2005-03-14 2006-09-21 Dainippon Screen Mfg Co Ltd 減圧乾燥装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS594031A (ja) * 1982-06-30 1984-01-10 Toshiba Corp 半導体製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS594031A (ja) * 1982-06-30 1984-01-10 Toshiba Corp 半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006253517A (ja) * 2005-03-14 2006-09-21 Dainippon Screen Mfg Co Ltd 減圧乾燥装置

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