JPS6235300U - - Google Patents

Info

Publication number
JPS6235300U
JPS6235300U JP12799985U JP12799985U JPS6235300U JP S6235300 U JPS6235300 U JP S6235300U JP 12799985 U JP12799985 U JP 12799985U JP 12799985 U JP12799985 U JP 12799985U JP S6235300 U JPS6235300 U JP S6235300U
Authority
JP
Japan
Prior art keywords
electron beam
degassing
electrons
ultra
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12799985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12799985U priority Critical patent/JPS6235300U/ja
Publication of JPS6235300U publication Critical patent/JPS6235300U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Physical Vapour Deposition (AREA)
JP12799985U 1985-08-21 1985-08-21 Pending JPS6235300U (US07714131-20100511-C00038.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12799985U JPS6235300U (US07714131-20100511-C00038.png) 1985-08-21 1985-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12799985U JPS6235300U (US07714131-20100511-C00038.png) 1985-08-21 1985-08-21

Publications (1)

Publication Number Publication Date
JPS6235300U true JPS6235300U (US07714131-20100511-C00038.png) 1987-03-02

Family

ID=31023269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12799985U Pending JPS6235300U (US07714131-20100511-C00038.png) 1985-08-21 1985-08-21

Country Status (1)

Country Link
JP (1) JPS6235300U (US07714131-20100511-C00038.png)

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