JPS6232527U - - Google Patents
Info
- Publication number
- JPS6232527U JPS6232527U JP12252485U JP12252485U JPS6232527U JP S6232527 U JPS6232527 U JP S6232527U JP 12252485 U JP12252485 U JP 12252485U JP 12252485 U JP12252485 U JP 12252485U JP S6232527 U JPS6232527 U JP S6232527U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- tank
- parallel
- etching
- etching tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252485U JPS6232527U (https=) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252485U JPS6232527U (https=) | 1985-08-09 | 1985-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232527U true JPS6232527U (https=) | 1987-02-26 |
Family
ID=31012790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12252485U Pending JPS6232527U (https=) | 1985-08-09 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232527U (https=) |
-
1985
- 1985-08-09 JP JP12252485U patent/JPS6232527U/ja active Pending