JPS62289752A - Surface inspecting device - Google Patents

Surface inspecting device

Info

Publication number
JPS62289752A
JPS62289752A JP13460986A JP13460986A JPS62289752A JP S62289752 A JPS62289752 A JP S62289752A JP 13460986 A JP13460986 A JP 13460986A JP 13460986 A JP13460986 A JP 13460986A JP S62289752 A JPS62289752 A JP S62289752A
Authority
JP
Japan
Prior art keywords
inspected
threshold value
noise
discriminating circuit
detection signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13460986A
Other languages
Japanese (ja)
Other versions
JPH0718814B2 (en
Inventor
Kenji Aizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP13460986A priority Critical patent/JPH0718814B2/en
Publication of JPS62289752A publication Critical patent/JPS62289752A/en
Publication of JPH0718814B2 publication Critical patent/JPH0718814B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To securely detect even a fine defect close to a surface noise component by setting a threshold value for the discrimination of an electric signal according to the level of a noise component due to the unevenness of the surface of a body to be inspected.
CONSTITUTION: Reflected light 6 from the surface of the body 1 to be inspected is detected by a photodetector 9, whose detection signal is inputted to a discriminating circuit 13 and an automatic noise measuring circuit 12 through an amplifier 10 and an AGC 11. The automatic noise measuring circuit 12 measures the mean upper-limit noise value per unit area of the surface of the body 1 to be inspected and the threshold value of a discriminating circuit 13 is set based on the mean upper-limit noise value. The discriminating circuit 13 discriminates the detection signal by using this threshold value and its output is processed by an image processing part 14 and sent to a display part 15, so that the surface defect of the inspected body 1 is displayed as an image. Consequently, the surface inspection with high accuracy is performed.
COPYRIGHT: (C)1987,JPO&Japio
JP13460986A 1986-06-10 1986-06-10 Surface inspection device Expired - Lifetime JPH0718814B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13460986A JPH0718814B2 (en) 1986-06-10 1986-06-10 Surface inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13460986A JPH0718814B2 (en) 1986-06-10 1986-06-10 Surface inspection device

Publications (2)

Publication Number Publication Date
JPS62289752A true JPS62289752A (en) 1987-12-16
JPH0718814B2 JPH0718814B2 (en) 1995-03-06

Family

ID=15132400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13460986A Expired - Lifetime JPH0718814B2 (en) 1986-06-10 1986-06-10 Surface inspection device

Country Status (1)

Country Link
JP (1) JPH0718814B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781688B2 (en) * 2002-10-02 2004-08-24 Kla-Tencor Technologies Corporation Process for identifying defects in a substrate having non-uniform surface properties
JP2010071722A (en) * 2008-09-17 2010-04-02 Nippon Steel Corp Method and device for inspecting unevenness flaws

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781688B2 (en) * 2002-10-02 2004-08-24 Kla-Tencor Technologies Corporation Process for identifying defects in a substrate having non-uniform surface properties
JP2010071722A (en) * 2008-09-17 2010-04-02 Nippon Steel Corp Method and device for inspecting unevenness flaws

Also Published As

Publication number Publication date
JPH0718814B2 (en) 1995-03-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term