JPS6228037U - - Google Patents

Info

Publication number
JPS6228037U
JPS6228037U JP11892085U JP11892085U JPS6228037U JP S6228037 U JPS6228037 U JP S6228037U JP 11892085 U JP11892085 U JP 11892085U JP 11892085 U JP11892085 U JP 11892085U JP S6228037 U JPS6228037 U JP S6228037U
Authority
JP
Japan
Prior art keywords
switching valve
subchambers
exhaust port
subchamber
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11892085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11892085U priority Critical patent/JPS6228037U/ja
Publication of JPS6228037U publication Critical patent/JPS6228037U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Characterised By The Charging Evacuation (AREA)
JP11892085U 1985-08-02 1985-08-02 Pending JPS6228037U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11892085U JPS6228037U (US07943777-20110517-C00090.png) 1985-08-02 1985-08-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11892085U JPS6228037U (US07943777-20110517-C00090.png) 1985-08-02 1985-08-02

Publications (1)

Publication Number Publication Date
JPS6228037U true JPS6228037U (US07943777-20110517-C00090.png) 1987-02-20

Family

ID=31005821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11892085U Pending JPS6228037U (US07943777-20110517-C00090.png) 1985-08-02 1985-08-02

Country Status (1)

Country Link
JP (1) JPS6228037U (US07943777-20110517-C00090.png)

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