Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP10292981ApriorityCriticalpatent/JPS585606A/ja
Publication of JPS585606ApublicationCriticalpatent/JPS585606A/ja
Publication of JPS6226683B2publicationCriticalpatent/JPS6226683B2/ja
G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
G01B11/00—Measuring arrangements characterised by the use of optical techniques
G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
G—PHYSICS
G01—MEASURING; TESTING
G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
G01B11/00—Measuring arrangements characterised by the use of optical techniques
G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
Physics & Mathematics
(AREA)
General Physics & Mathematics
(AREA)
Length Measuring Devices By Optical Means
(AREA)
Length Measuring Devices With Unspecified Measuring Means
(AREA)