JPS6226485U - - Google Patents

Info

Publication number

JPS6226485U

JPS6226485U JP11738785U JP11738785U JPS6226485U JP S6226485 U JPS6226485 U JP S6226485U JP 11738785 U JP11738785 U JP 11738785U JP 11738785 U JP11738785 U JP 11738785U JP S6226485 U JPS6226485 U JP S6226485U

Authority

JP

Japan

Prior art keywords

vacuum chamber

drain pipe

housing

connection part

pipe connection

Prior art date

1985-07-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
• 238000004140 cleaning Methods 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 238000009423 ventilation Methods 0.000 description 1