JPS62262756A - Method for controlling liquid filter - Google Patents
Method for controlling liquid filterInfo
- Publication number
- JPS62262756A JPS62262756A JP61107238A JP10723886A JPS62262756A JP S62262756 A JPS62262756 A JP S62262756A JP 61107238 A JP61107238 A JP 61107238A JP 10723886 A JP10723886 A JP 10723886A JP S62262756 A JPS62262756 A JP S62262756A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- adsorbent
- treated
- filtration device
- liq
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 title claims description 130
- 238000000034 method Methods 0.000 title claims description 18
- 239000003463 adsorbent Substances 0.000 claims abstract description 65
- 238000001914 filtration Methods 0.000 claims abstract description 52
- 239000007789 gas Substances 0.000 claims description 21
- 239000011261 inert gas Substances 0.000 claims description 11
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000006386 neutralization reaction Methods 0.000 claims description 2
- 239000012535 impurity Substances 0.000 abstract description 20
- 239000010687 lubricating oil Substances 0.000 abstract description 9
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000012670 alkaline solution Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000007726 management method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011859 microparticle Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
- Filtration Of Liquid (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、例えば真容ｆンプの潤滑油のろ過等に用い
られる液体ろ過装置の、例えば運転時の保守管理を行う
液体ろ過装置の管理方法に関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention is directed to the management of a liquid filtration device that performs maintenance and management during operation of a liquid filtration device used, for example, for filtering lubricating oil of a true pump. It is about the method.
〔従来の技術〕
第９図は従来の液体ろ過装置を示し、図において、容器
（１）は、送入口（２）を有し導電体からなる容器部（
１ａ）と、容器部（ｌａ）の開口（１ｂ）を覆い送出口
（３）を有するふた部（ｌｃ）とを備えている。フィル
タ（４）はその一端面がふた部（ＩＣ）に取り付けられ
、送入口（２）から容器（１）内に送入された液体をろ
過して後、送出口（３）から容器（１）外に送出する。[Prior Art] Fig. 9 shows a conventional liquid filtration device. In the figure, a container (1) has an inlet (2) and a container part (
1a), and a lid part (lc) that covers the opening (1b) of the container part (la) and has a delivery port (3). One end of the filter (4) is attached to the lid (IC), and after filtering the liquid introduced into the container (1) from the inlet (2), the filter (4) is inserted into the container (1) from the outlet (3). Send it outside.
電極（５）は絶縁物（５０１）を介してふた部（ｌｃ）
に取り付けられ、フィルタ（４）を内部に挿入するよう
に筒状に構成されている。電圧印加手段（６）は容器部
（１ａ）の外周部と［極（５）とによって構成され、容
器（１）内の液体に電圧を印加するものである。The electrode (5) is connected to the lid (lc) via the insulator (501).
It has a cylindrical shape so that the filter (4) can be inserted inside. The voltage applying means (6) is constituted by the outer periphery of the container part (1a) and the electrode (5), and applies a voltage to the liquid in the container (1).
次に動作について説明する。送入口（２）より矢印イの
ように容器（１）内に送入された液体は、電圧印加手段
（６）によって電圧が印加される。このため液体中の不
純物は、イオン化され、または電気二重層が破壊され、
もしくは電気二重層のゼータ電位が中和されて、不純物
同士が静電凝集して大きくなり、フィルタ（４）でろ過
されて後、送出口（３）から矢印口のように容器（１）
外に送出される。Next, the operation will be explained. A voltage is applied to the liquid introduced into the container (1) from the inlet (2) as shown by arrow A by the voltage application means (6). For this reason, impurities in the liquid are ionized or the electric double layer is destroyed,
Alternatively, the zeta potential of the electric double layer is neutralized, and the impurities electrostatically coagulate and become larger. After being filtered by the filter (4), it flows from the outlet (3) to the container (1) as indicated by the arrow.
sent outside.
゛ 〔発明が解決しようとする問題点〕上記のようなろ
過装置では、液体が例えば真空ポンプの潤滑油の場合に
は、液体中の不純物がミク。オーダのように細かく、フ
ィルり（４ンでろ矛されるまで不純物が静電凝集して大
きくなるのに、長時間を要する問題点があった。また、
液体が例えば半導体製造ラインの真空ポンプの潤滑油の
場合には、シラン等のガスが潤滑油中に混入し、液体ろ
過装置内に空気があると、発火する問題点があった。さ
らに、液体ろ過処理後の廃棄物処理に問題があった。゛ [Problem to be solved by the invention] In the above-mentioned filtration device, when the liquid is lubricating oil for a vacuum pump, for example, impurities in the liquid are mixed. There was a problem in that it took a long time for the impurities to electrostatically aggregate and grow until they were filled in as finely as the order of magnitude.
For example, when the liquid is lubricating oil for a vacuum pump in a semiconductor manufacturing line, there is a problem that gas such as silane gets mixed into the lubricating oil, and if air is present in the liquid filtering device, it can catch fire. Additionally, there were problems with waste disposal after liquid filtration.
この発明はかかる問題点を除去するためになされたもの
で、液体中の不純物を短時間でろ過し、不純物を強力に
吸着剤に吸着させる液体ろ過装置において、発火する恐
れがなく、また、廃棄物処理を安全に行う液体ろ過装置
の管理方法を提供することを目的とする。This invention was made to eliminate such problems, and is a liquid filtration device that filters impurities in a liquid in a short time and strongly adsorbs the impurities to an adsorbent. The purpose of this invention is to provide a method for managing liquid filtration equipment that safely processes substances.
この発明にかかる液体ろ過装置の管理方法は、被処理液
体に電圧を印加する電圧印加手段と、電圧が印加された
液体を吸着剤内に流通させる吸着手段と、吸着剤内を通
過した液体をフィルタでろ過するろ過手段とを備えた液
体ろ過装置において、程に、吸着剤の含有気体を、被処
理液体と同種の液体もしくは被処理液体に無害の液体あ
るいは不活性ガスに置換する置換工程を備え、または、
被処理液体の処理終了後に、液体ろ過装置の少なくとも
吸着剤の設置部分に、アルカリ性流体を流通させて、吸
着剤を中和させる中和工程を備えたものである。A method for managing a liquid filtration device according to the present invention includes: a voltage applying means for applying a voltage to a liquid to be treated; an adsorption means for circulating the voltage-applied liquid through an adsorbent; In a liquid filtration device equipped with a filtration means for filtering with a filter, a replacement step is performed in which the gas contained in the adsorbent is replaced with a liquid of the same type as the liquid to be treated, a liquid that is harmless to the liquid to be treated, or an inert gas. preparedness, or
After the treatment of the liquid to be treated is completed, the liquid filtration apparatus includes a neutralization step of flowing an alkaline fluid through at least the portion where the adsorbent is installed to neutralize the adsorbent.
この発明においては、電圧印加手段によって、液体中の
不純物をイオン化し、または電気二重層を破壊し、もし
くは電気二重層のゼータ電位を中和して、不純物同士を
静電凝集し、吸着手段によって不純物を吸着させ、ろ過
手段によってろ過する電圧印加の前工程において、吸着
剤の含有気体を、被処理液体と同種の液体もしくは被処
理液体に無害の液体あるいは不活性ガスに置換して、発
火を防止し、または、ろ過終了後の後工程において、吸
着剤をアルカリ性流体で無害に中和処理する。In this invention, the impurities in the liquid are ionized by the voltage application means, the electric double layer is destroyed, or the zeta potential of the electric double layer is neutralized, the impurities are electrostatically aggregated, and the impurities are electrostatically aggregated by the adsorption means. In the pre-voltage application process where impurities are adsorbed and filtered by a filtration means, the gas contained in the adsorbent is replaced with a liquid of the same type as the liquid to be treated, a liquid that is harmless to the liquid to be treated, or an inert gas to prevent ignition. Alternatively, in a post-process after filtration, the adsorbent is harmlessly neutralized with an alkaline fluid.
第１図はこの発明に適用される液体ろ過装置の一実施例
を示し、図において、容器（１）は、送入口（２）を有
する容器部（１ａ）と、容器部（ｌａ）の開口（ｌｂ）
を覆うふた部（ｌｃ）とから構成されている。容器部（
１ａ）の底面はテーパー（ｌｄ）が形成され、テーパー
（１ｄ）に連通して容器部（１ａ）の側面の下部に第１
のドレン（１ｅ）が設けられている。えた部（ｌｃ）に
は、第２のドレン（１ｆ）が設けられ、かつ、絶縁物（
１ｇ）を介して、後述の密封容器（５Ｃ）に接続される
電極接続導体（ｌｈ）が貫通挿入されている。ポル）
（ｌｉ）は容器部（１ａ）とふた部（ｌｃ）とを取り付
けている。FIG. 1 shows an embodiment of a liquid filtration device applied to the present invention. In the figure, a container (1) has a container part (1a) having an inlet port (2), and an opening of the container part (la). (lb)
It consists of a lid part (lc) that covers the. Container part (
A taper (ld) is formed on the bottom surface of the container portion (1a), and a first hole is formed at the bottom of the side surface of the container portion (1a) and communicates with the taper (1d).
A drain (1e) is provided. A second drain (1f) is provided in the drained portion (lc), and an insulating material (
1g), an electrode connection conductor (lh) connected to a sealed container (5C), which will be described later, is penetrated and inserted. Pol)
(li) attaches the container part (1a) and the lid part (lc).
送出口（８Ａ）は導電体のパイプからなり、ふた部（Ｉ
Ｃ）と、ふた部（ＩＣ）に一端面が取り付けられた絶縁
物の誘電体からなるフィルタ（４Ａ）とに貫通挿入され
、フィルタ（４Ａ）の他端面から突出した一端部（３ａ
）は、後述の袋ナツトである取り付は具（８）によって
閉塞され、かつフィルタ（４Ａ）内の部分には貫通孔（
８ｂ）が均等に穿設されている。第１のＷｆ極（５Ａ）
は多孔体もしくは網目状体で筒状に構成され、フィルタ
（４Ａ）を収納して、その一端面は絶縁物（６ｘ）を介
してふた部（ＩＣ）に取り付けられ、電極接続導体（ｌ
ｈ） Ｋ接続されている。第２の電極（５Ｂ）は多孔体
もしくは網目状体で筒状に構成され、第１の電１（５Ａ
）を収納しており、その一端面は絶縁物（５ｘ）を介し
てふた部（ＩＣ）に取り付けられ、第１の電極（５Ａ）
と同電位に電極接続導体（ｌｈ）に接続されている。密
封容器（５Ｃ）は円筒状の中空部（６Ｄ）を形成するよ
うに第１．第２の電極（５Ａ） 、 （５Ｂ）の両端面
を閉塞して構成されている。電圧印加手段（６Ａ）は、
容器部（ｌａ）と第１．第２の電Ｗ１（５ム）、（５Ｂ
）と送出口（８Ａ）とからなっている。底板（７）は、
例えば絶縁物で構成されており、送出口（８Ａ）の一端
部（８ａ）を貫通させ、フィルタ（４Ａ）と第１．第２
の電極（５Ａ）・（５Ｂ）とのそれぞれの他端面に接し
て設置されている。取り付は具（８）は例えば袋ナツト
であり、送出口（８Ａ）の一端部（８ａ）の外周に螺合
して、送出口（８Ａ）の一端部（８ａ）を閉塞するとと
もに、底板（７）を送出口（８Ａ）に泡り付ける。吸着
剤（９）は例えばゼオ／’％ −ブ、シルビート、活性
白土等であり、第１．第２の電極（５Ａ） 、 （５Ｂ
）間、即ち、密封容器（５Ｃ）の中空部（５Ｄ）内に封
入されている。変圧器ＱＧは電極接続導体（１ｈ）を介
して第１．第２の電極（５Ａ） 、 （５Ｂ）とふた部
（ＩＣ）及び送出口（８Ａ）間に接続され、第１゜第２
の電極（５Ａ） 、 （５Ｂ）が正電位に、ふた部（Ｉ
Ｃ）及ヒ送出口（８Ａ）がアース電位になるように、例
えばｔｏ 〜８ｏ００Ｖ／ＣＭＬｏｔＥＥヲ印、ｆｌｌ
ｌスル。The outlet (8A) is made of a conductive pipe, and the lid part (I
C) and a filter (4A) made of an insulating dielectric whose one end surface is attached to the lid (IC), and is inserted through the filter (4A) and protrudes from the other end surface of the filter (4A).
) is a cap nut (to be described later), which is closed by a fitting (8), and a through hole (
8b) are evenly drilled. First Wf pole (5A)
has a cylindrical shape made of porous or mesh material, houses the filter (4A), and has one end attached to the lid (IC) via the insulator (6x), and is connected to the electrode connecting conductor (l).
h) K is connected. The second electrode (5B) is made of a porous or mesh material and has a cylindrical shape.
), one end surface of which is attached to the lid (IC) via an insulator (5x), and the first electrode (5A)
It is connected to the electrode connection conductor (lh) at the same potential as . The sealed container (5C) has a first cylindrical hollow part (6D). It is constructed by closing both end surfaces of the second electrodes (5A) and (5B). The voltage application means (6A) is
The container part (la) and the first. Second electric W1 (5m), (5B
) and an outlet (8A). The bottom plate (7) is
For example, it is made of an insulating material, and is passed through one end (8a) of the outlet (8A) and connected to the filter (4A) and the first. Second
The electrodes (5A) and (5B) are placed in contact with the other end surfaces of the electrodes (5A) and (5B). For installation, the tool (8) is, for example, a cap nut, which is screwed onto the outer periphery of one end (8a) of the outlet (8A) to close the one end (8a) of the outlet (8A), and also to close the bottom plate. Foam (7) into the outlet (8A). The adsorbent (9) is, for example, zeo/'%-b, sylvite, activated clay, etc. Second electrode (5A), (5B
), that is, in the hollow part (5D) of the sealed container (5C). The transformer QG is connected to the first . The second electrodes (5A) and (5B) are connected between the lid part (IC) and the outlet (8A), and are connected between the first and second electrodes.
The electrodes (5A) and (5B) of the lid part (I
C) For example, to ~8o00V/CMLotEE mark, flll so that the output port (8A) is at ground potential.
l sul.
次に動作について説明する。送入口（２）より矢印イの
ように容器（１）内に送入された液体は、電圧印加手段
（６Ａ）によって、電圧が印加される。このため、容器
部（１ａ）と第２の電極（５Ｂ）間に送入された液体中
の比較的粒子の大きい不純物は、第２の電ＩＭ （５Ｂ
）にクーロン力で吸引され、電気泳動で第２の電極（５
Ｂ）の周囲に集まり、ゼータ−電位が消去されて、分子
間引力で凝集粗大化する。液体より比重の軽い不純物は
、矢印ノ１に示すように浮上分離し、第２のドレン（１
ｆ）から容器（１）外に除去される。ｔた、液体より比
重の重い不純物は、矢印二に示すように沈降分離し、第
１のドレン（１ｅ）から容器（１）外に除去される。Next, the operation will be explained. A voltage is applied to the liquid introduced into the container (1) from the inlet (2) as shown by arrow A by the voltage application means (6A). Therefore, impurities with relatively large particles in the liquid sent between the container part (1a) and the second electrode (5B) are removed from the second electrode IM (5B).
) is attracted to the second electrode (5
They gather around B), their zeta potential disappears, and they aggregate and become coarse due to intermolecular attraction. Impurities with a specific gravity lighter than the liquid float up and separate as shown in arrow No. 1, and flow into the second drain (1
f) out of the container (1). In addition, impurities having a specific gravity heavier than the liquid are separated by sedimentation as shown by arrow 2, and are removed from the container (1) through the first drain (1e).
このように比較的粒子の大きい不純物が除去された液体
は、圧力によって矢印ホのように密封容器（５Ｃ）内に
送入され、中空部（５Ｄ）内に封入された吸着剤（９）
に均等に接触する。この場合、吸着剤（９）の細孔表面
のイオンは第１．第２の電極（５Ａ）、（５Ｂ）の課電
によって増強されており、このイオンのクーロン力によ
って、ガス及び水並びに低分子の不純物は吸着剤（９）
に吸着除去される。The liquid from which relatively large-particle impurities have been removed is sent under pressure into a sealed container (5C) as shown by the arrow H, and is filled with an adsorbent (9) sealed in a hollow part (5D).
contact evenly. In this case, the ions on the pore surface of the adsorbent (9) are the first. This is reinforced by the application of electricity to the second electrodes (5A) and (5B), and the Coulombic force of these ions moves gas, water, and low-molecular impurities to the adsorbent (9).
is adsorbed and removed.
一方、絶縁物の誘電体よりなるフィルタ（４Ａ）は、第
１の［極（５Ａ）と送出口（８Ａ）とによって電圧が印
加されて、誘電電荷を帯電する。このため、吸着剤（９
）を通過して後、液体中に残っているコロイド粒子、マ
イクロ粒子は、デンプ圧力とフィルタ（４Ａ）の誘電電
荷にひかれて、フィルタ（４Ａ）の外周上に集まり、ゼ
ータ−電位が消去されて凝集し、ケークを造り、残存粒
子を捕捉する。このようにして不純物がろ過された液体
は、送出口（８Ａ）の貫通孔（８ｂ）から送出口（８Ａ
）を経て、矢印口に示すように容器（１）外に送出され
る。On the other hand, a voltage is applied to the filter (4A) made of an insulating dielectric material through the first pole (5A) and the outlet (8A), and the filter is charged with a dielectric charge. For this reason, the adsorbent (9
), the colloidal particles and microparticles remaining in the liquid are attracted by the starch pressure and the dielectric charge of the filter (4A) and collect on the outer periphery of the filter (4A), and the zeta potential is erased. to form a cake and trap any remaining particles. The liquid from which impurities have been filtered in this way is passed from the through hole (8b) of the outlet (8A) to the outlet (8A).
), and is sent out of the container (1) as shown by the arrow opening.
また、フィルタ（４Ａ）及び吸着剤（９）並びに第１゜
第２の電極（５Ａ） 、 （５Ｂ）を取り換えるには、
ふた部（１ｃ）を容器部（ｌａ）から取り外し、その後
、締め付は具（８）を外して底板（７）を取り外し、フ
ィルタ（４Ａ）と第１．第２の電極（５Ａ） 、 （５
Ｂ）並びに密封容器（５Ｄ）内の吸着剤（９）とを取り
換える。In addition, to replace the filter (4A), adsorbent (9), and the first and second electrodes (5A) and (5B),
Remove the lid part (1c) from the container part (la), then remove the tightening tool (8), remove the bottom plate (7), and remove the filter (4A) and the first. Second electrode (5A), (5
B) and the adsorbent (9) in the sealed container (5D).
なお、吸着剤（９）で吸着されなかったガスは、第１、
第２の電＠ （５Ａ）、（５Ｂ）が多孔体もしくは網目
状体であり、送出口（８Ａ）に貫通孔（８ｂ）が設けら
れているため、液体と共に容器（１）外に排出される。Note that the gas not adsorbed by the adsorbent (9) is
The second electrodes (5A) and (5B) are porous or mesh-like bodies, and the outlet (8A) is provided with a through hole (8b), so that they are discharged out of the container (1) together with the liquid. Ru.
次に第１図に示す液体ろ過装置の吸着剤（９）の含有気
体の除去について説明する。吸着剤（９）には、体積比
にして、約１５％の含有気体が存在する。このため、被
処理液体が半導体の製造に使用される真空ポンプの潤活
油の場合、潤活油内に例えばシラン等のガスが混入する
と、空気に触れて発火する恐れがある。このため、吸着
剤（９）の含有気体を除去する必要がある。Next, the removal of gas contained in the adsorbent (9) of the liquid filtration apparatus shown in FIG. 1 will be explained. The adsorbent (9) contains about 15% gas by volume. For this reason, when the liquid to be treated is a lubricating oil for a vacuum pump used in the manufacture of semiconductors, if a gas such as silane is mixed into the lubricating oil, there is a risk that it will come into contact with air and catch fire. Therefore, it is necessary to remove the gas contained in the adsorbent (9).
この吸着剤（９）の含有気体を除去するには、第２図に
示すように、吸着剤（９）を容器（ロ）内に収納して後
、容器（６）内に被処理液体と同種の液体（２）もしく
は被処理液体に無害の液体（２）を入れて放置し、吸着
剤（９）の含有気体を液体（６）と置換させる。To remove the gas contained in the adsorbent (9), as shown in Figure 2, after storing the adsorbent (9) in a container (b), place the liquid to be treated in the container (6). A harmless liquid (2) is added to the same type of liquid (2) or the liquid to be treated and left to stand, and the gas contained in the adsorbent (9) is replaced with the liquid (6).
また、第８図に示すように、吸着剤（９）を密封容器（
５Ｃ）内に収納して後、液体ろ過装置を運転し、液体ろ
過装置内に被処理液体と同種の液体（２）もしくは被処
理液体に無害の液体（２）を流入させて、吸着剤（９）
の含有気体を液体（２）に置換してもよい。In addition, as shown in Fig. 8, the adsorbent (9) is placed in a sealed container (
5C), the liquid filtration device is operated, and a liquid (2) of the same type as the liquid to be treated or a liquid (2) that is harmless to the liquid to be treated flows into the liquid filtration device. 9)
The gas contained in the liquid (2) may be replaced with the liquid (2).
さらに、第４図に示すように、吸着剤（９）を密封容器
（至）内に収納して後、真空ポンプＱ４で密封容器（至
）内を真空にし、その後、密封容器（至）内に被処理液
体と同種の液体（２）もしくは被処理液体に無害の液体
（２）を流入させて、吸着剤（９）の含有気体を液体（
２）Ｋ置換してもよい。Furthermore, as shown in Fig. 4, after storing the adsorbent (9) in the sealed container (to), the inside of the sealed container (to) is evacuated using the vacuum pump Q4, and then the inside of the sealed container (to) is evacuated. A liquid (2) of the same type as the liquid to be treated or a liquid (2) that is harmless to the liquid to be treated is introduced into the liquid (2) to remove the gas contained in the adsorbent (9).
2) May be substituted with K.
さらにまた、第５図に示すように、吸着剤（９）を密封
容器（６ｃ）内に収納して後、真空ポンプα→で液体ろ
過装置内を真空にし、その後、液体ろ過装置を運転し、
液体ろ過装置内に被処理液体と同種の液体（２）、もし
くは被処理液体く無害の液体（２）を流入させて、吸着
剤（９）の含有気体を液体（２）に置換してもよい。Furthermore, as shown in Fig. 5, after storing the adsorbent (9) in the sealed container (6c), the inside of the liquid filtration device is evacuated with the vacuum pump α→, and then the liquid filtration device is operated. ,
Even if a liquid (2) of the same type as the liquid to be treated or a liquid (2) that is harmless to the liquid to be treated flows into the liquid filtration device, the gas contained in the adsorbent (9) is replaced with the liquid (2). good.
さらＫｔた、第６図に示すように、吸着剤（９）を密封
容器に）内に収納して後、真空ポンプ（ロ）で密封容器
（至）内を真空にし、その後、密封容器（２）内に窒素
、アルゴン等の不活性ガスに）を流入させて、吸着剤（
９）の含有気体を、不活性ガスａａＫ置換してもよい。Furthermore, as shown in Figure 6, after storing the adsorbent (9) in a sealed container, the inside of the sealed container is evacuated using a vacuum pump (b), and then the sealed container ( 2) Inject an inert gas (such as nitrogen or argon) into the adsorbent (
The gas contained in 9) may be replaced with an inert gas aaK.
さらにまた、第７図に示すように、吸着剤（９）を密封
容器（６Ｃ）内に収納して後、真空ポンプＱ４で液体ろ
過装置内を真空にし、その後、液体ろ過装置内に不活性
ガスに）を流入させ、吸着剤（９）の含有気体を不活性
ガス（ト）Ｋ置換してもよい。Furthermore, as shown in FIG. 7, after storing the adsorbent (9) in a sealed container (6C), the inside of the liquid filtration apparatus is evacuated using a vacuum pump Q4, and then an inert liquid is placed inside the liquid filtration apparatus. The gas contained in the adsorbent (9) may be replaced with an inert gas (g)K by flowing a gas (g) into the adsorbent (9).
なお、上記各実施例は、高圧印加手段（６Ａ）と、フィ
ルタ（４Ａ）と、吸着剤（９）とを、同一容器（１）内
に収納した場合について説明したが、例えばそれぞれが
別個の容器に収納されていてもよく、また、この場合に
は、吸着剤（９）を収納した容器内のみに、液体をもし
くは不活性ガスを流入させてもよい。In each of the above embodiments, the high pressure application means (6A), the filter (4A), and the adsorbent (9) are housed in the same container (1). The adsorbent (9) may be housed in a container, and in this case, the liquid or inert gas may be allowed to flow only into the container housing the adsorbent (9).
また、以上のようにして被処理液体のろ過を終了すると
、被処理液体が例えば半導体の製造に使用される真空ポ
ンプの潤活油の場合、潤活油中に例えばシラン、フォス
フイン、アルシン等の化合生成物が含まれることがある
。この場合には、吸着剤（９）を例えば石灰水等のアル
カリ性溶液で中和する必要がある。In addition, when the filtration of the liquid to be treated is completed as described above, if the liquid to be treated is a lubricating oil for a vacuum pump used in the manufacture of semiconductors, for example, silane, phosphine, arsine, etc. may be present in the lubricating oil. May contain compound products. In this case, it is necessary to neutralize the adsorbent (9) with an alkaline solution such as lime water.
第８図は吸着剤（９）を中和する方法を示す。即ち、被
処理液体のろ過が終了すると、容器（１）内にアルカリ
性溶液Ｑ１を流入させて、吸着剤（９）を中和させ、そ
の後、ふた部（ｌｃ）を取り外して吸着剤（９）を廃棄
処理する。Figure 8 shows a method of neutralizing the adsorbent (9). That is, when the filtration of the liquid to be treated is completed, the alkaline solution Q1 is flowed into the container (1) to neutralize the adsorbent (9), and then the lid (lc) is removed and the adsorbent (9) is removed. Dispose of it.
なお、この実施例でも、電圧印加手段（６Ａ）と、フィ
ルタ（４人）と、吸着剤（９）とを、同一容器（１）内
に収納した場合について説明したが、例えば、それぞれ
が別個の容器に収納されていてもよく、また、この場合
にも、吸着剤（９）を収納した容器内のみに、アルカリ
性溶液（至）を流入させてもよい。In this example, the case where the voltage application means (6A), the filter (4 persons), and the adsorbent (9) are housed in the same container (1) has been described, but for example, each may be housed separately. Also, in this case, the alkaline solution (9) may be allowed to flow only into the container containing the adsorbent (9).
以上のように、この発明によれば、容器内に送入された
被処理液体に電圧を印加して、不純物を凝集し、吸着剤
によって、ガス及び水並びに低分子の不純物を吸着除去
し、さらにコロイド粒子。As described above, according to the present invention, a voltage is applied to the liquid to be treated that is sent into a container to aggregate impurities, and the adsorbent adsorbs and removes gas, water, and low-molecular impurities. More colloidal particles.
マイクロ粒子を凝集してフィルタで捕捉する液体ろ過装
置の、電圧を印加する前工程に、吸着剤の含有気体を、
被処理液体と同種の液体もしくは被処理液体に無害の液
体あるいは不活性ガスに置換する置換工程を設けている
ため、発火する恐れがない、また、被処理液体のろ過終
了後に、液体ろ過装置内に、アルカリ性溶液を流入させ
ているため、吸着剤を安全に廃棄処理することができる
。In a liquid filtration device that aggregates microparticles and captures them with a filter, the adsorbent-containing gas is
A replacement process is provided to replace the liquid to be treated with the same type of liquid or with a harmless liquid or inert gas, so there is no risk of ignition. Since an alkaline solution is flowed into the adsorbent, the adsorbent can be safely disposed of.
第１図はこの発明に適用される液体ろ過装置の一実施例
を示す断面図、第２図〜第７図は吸着剤の含有気体の置
換方法の説明図、第８図は吸着剤の中和方法の説明図、
第９図は従来の液体ろ過装置を示す断面図である。
図において、（１）は容器、（１ａ）は容器部、（４Ａ
）はフィルタ、（５Ａ） 、 （５Ｂ）は第１．第２の
電極、（５Ｃ）は密封容器、（６人）は電圧印加手段、
（９）は吸着剤、（ロ）は容器、に）は液体、（至）は
密封容器、α◆は真空ポンプ、（至）は不活性ガス、（
至）はアルカリ性溶液である。
なお、図中同一符号は同一または相当部分を示す。Fig. 1 is a sectional view showing an embodiment of a liquid filtration device applied to the present invention, Figs. 2 to 7 are explanatory diagrams of a method of replacing gas contained in an adsorbent, and Fig. 8 is a cross-sectional view showing an example of a liquid filtration device applied to the present invention. An explanatory diagram of the sum method,
FIG. 9 is a sectional view showing a conventional liquid filtration device. In the figure, (1) is a container, (1a) is a container part, (4A
) is the filter, (5A) and (5B) are the first. The second electrode, (5C) a sealed container, (6 people) a voltage application means,
(9) is an adsorbent, (b) is a container, ni) is a liquid, (to) is a sealed container, α◆ is a vacuum pump, (to) is an inert gas, (
) is an alkaline solution. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (7)
記電圧印加手段で電圧が印加された液体を吸着剤内に流
通させる吸着手段と、前記吸着剤内を通過した液体をフ
ィルタでろ過するろ過手段とを備えた液体ろ過装置にお
いて、前記電圧印加手段で被処理液体に電圧を印加する
前工程に、前記吸着剤の含有気体を、前記被処理液体と
同種の液体あるいは前記被処理液体に無害の液体もしく
は不活性ガスに置換する置換工程を備えたことを特徴と
する液体ろ過装置の管理方法。(1) Voltage applying means for applying a voltage to the liquid to be treated; adsorption means for circulating the liquid to which the voltage has been applied by the voltage applying means through the adsorbent; and filtering the liquid that has passed through the adsorbent. In the liquid filtration apparatus, the gas contained in the adsorbent is added to a liquid of the same type as the liquid to be treated or to the liquid to be treated before applying a voltage to the liquid to be treated by the voltage applying means. 1. A method for managing a liquid filtration device, comprising a replacement step of replacing the liquid with a harmless liquid or inert gas.
液体と同種の液体あるいは前記被処理液体に無害の液体
を入れて行うことを特徴とする特許請求の範囲第（１）
項記載の液体ろ過装置の管理方法。(2) The replacement step is performed by placing a liquid of the same type as the liquid to be treated or a liquid harmless to the liquid to be treated in a container containing the adsorbent.
How to manage the liquid filtration device described in Section 1.
、前記液体ろ過装置に、被処理液体と同種の液体あるい
は前記被処理液体に無害の液体を流通させて行うことを
特徴とする特許請求の範囲第（１）項記載の液体ろ過装
置の管理方法。(3) The replacement step is characterized in that after an adsorbent is installed in a liquid filtration device, a liquid of the same type as the liquid to be treated or a liquid that is harmless to the liquid to be treated is passed through the liquid filtration device. A method for managing a liquid filtration device according to claim (1).
た後、前記容器内に、被処理液体と同種の液体あるいは
前記被処理液体に無害の液体もしくは不活性ガスを流入
して行うことを特徴とする特許請求の範囲第（１）項記
載の液体ろ過装置の管理方法。(4) The replacement step is performed by evacuating the inside of the container containing the adsorbent, and then flowing a liquid of the same type as the liquid to be treated, a liquid or an inert gas harmless to the liquid to be treated into the container. A method for managing a liquid filtration device according to claim (1).
記液体ろ過装置の少なくとも前記吸着剤の設置部分を真
空にした後、前記液体ろ過装置に、被処理液体と同種の
液体あるいは前記被処理液体に無害の液体を流入させて
行うことを特徴とする特許請求の範囲第（１）項記載の
液体ろ過装置の管理方法。(5) In the replacement step, an adsorbent is installed in a liquid filtration device, and at least a portion of the liquid filtration device where the adsorbent is installed is evacuated, and then a liquid of the same type as the liquid to be treated or a liquid of the same type as the liquid to be treated or the A method for managing a liquid filtration device according to claim 1, characterized in that the method is carried out by flowing a harmless liquid into the liquid to be treated.
記液体ろ過装置の少なくとも前記吸着剤の設置部分を真
空にした後、前記真空部分に不活性ガスを流入させて行
うことを特徴とする特許請求の範囲第（１）項記載の液
体ろ過装置の管理方法。(6) The replacement step is performed by installing an adsorbent in a liquid filtration device, evacuating at least a portion of the liquid filtration device where the adsorbent is installed, and then flowing an inert gas into the vacuum portion. A method for managing a liquid filtration device according to claim (1).
記電圧印加手段で電圧が印加された被体を吸着剤内に流
通させる吸着手段と、前記吸着剤内を通過した液体をフ
ィルタでろ過するろ過手段とを備えた液体ろ過装置にお
いて、前記被処理液体の処理終了後に、前記液体ろ過装
置の少なくとも前記吸着剤を設置した部分にアルカリ性
流体を流通させて、前記吸着剤を中和させる中和工程を
備えたことを特徴とする特許請求の範囲第（１）項記載
の液体ろ過装置の管理方法。(7) Voltage applying means for applying a voltage to the liquid to be treated; adsorption means for circulating the object to which the voltage is applied by the voltage applying means through the adsorbent; and a filter for the liquid that has passed through the adsorbent. In a liquid filtration device equipped with a filtration means for filtering, after the processing of the liquid to be treated is completed, an alkaline fluid is caused to flow through at least a portion of the liquid filtration device where the adsorbent is installed to neutralize the adsorbent. A method for managing a liquid filtration device according to claim 1, further comprising a neutralization step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61107238A JPS62262756A (en) | 1986-05-09 | 1986-05-09 | Method for controlling liquid filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61107238A JPS62262756A (en) | 1986-05-09 | 1986-05-09 | Method for controlling liquid filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62262756A true JPS62262756A (en) | 1987-11-14 |
Family
ID=14453982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61107238A Pending JPS62262756A (en) | 1986-05-09 | 1986-05-09 | Method for controlling liquid filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62262756A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111097226A (en) * | 2019-11-22 | 2020-05-05 | 丁亮 | Vacuum oil filter |
-
1986
- 1986-05-09 JP JP61107238A patent/JPS62262756A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111097226A (en) * | 2019-11-22 | 2020-05-05 | 丁亮 | Vacuum oil filter |
| CN111097226B (en) * | 2019-11-22 | 2021-11-09 | 上海韦航装备科技有限公司 | Vacuum oil filter |
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