JPS62261046A - Surface inspecting device - Google Patents

Surface inspecting device

Info

Publication number
JPS62261046A
JPS62261046A JP10359886A JP10359886A JPS62261046A JP S62261046 A JPS62261046 A JP S62261046A JP 10359886 A JP10359886 A JP 10359886A JP 10359886 A JP10359886 A JP 10359886A JP S62261046 A JPS62261046 A JP S62261046A
Authority
JP
Japan
Prior art keywords
difference
circuits
photoelectric conversion
surface
detection circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10359886A
Inventor
Ryoji Nemoto
Yoshikazu Tanabe
Toshiaki Taniuchi
Original Assignee
Hitachi Electronics Eng Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Eng Co Ltd, Hitachi Ltd filed Critical Hitachi Electronics Eng Co Ltd
Priority to JP10359886A priority Critical patent/JPS62261046A/en
Publication of JPS62261046A publication Critical patent/JPS62261046A/en
Application status is Pending legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/94Investigating contamination, e.g. dust

Abstract

PURPOSE:To obtain an inspecting device less susceptible to the deterioration or the like in parts of the equipment, by detecting a difference between two output signals among a plurality of photoelectric conversion elements. CONSTITUTION:A light beam generated from a light source 16 is projected slantly to the surface of a semiconductor wafer 10 on a rotary stage 12 through a lens 18. The scattered light almost vertical from the surface of the wafer passes through an objective lens 20 to be incident into a diode array 24 with 50 photoelectric conversion elements arranged linearly. A difference detection circuit 26 which detects an absolute value of the difference between two input signals are made up of 25 circuits for outputting an voltage proportional thereto and output signals of specified two elements separated from each other at an interval equivalent to the 25 circuits each are inputted thereinto. A comparator 28 compares an output voltage of a corresponding difference detection circuit 26 with a threshold voltage and an output signal thereof is ORed with an OR gate 30 to be a final foreign matter detection signal.
JP10359886A 1986-05-06 1986-05-06 Surface inspecting device Pending JPS62261046A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10359886A JPS62261046A (en) 1986-05-06 1986-05-06 Surface inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10359886A JPS62261046A (en) 1986-05-06 1986-05-06 Surface inspecting device

Publications (1)

Publication Number Publication Date
JPS62261046A true JPS62261046A (en) 1987-11-13

Family

ID=14358201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10359886A Pending JPS62261046A (en) 1986-05-06 1986-05-06 Surface inspecting device

Country Status (1)

Country Link
JP (1) JPS62261046A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223986A (en) * 1975-08-19 1977-02-23 Nippon Steel Corp Method of detecting surface flaws
JPS5412837A (en) * 1977-06-30 1979-01-30 Ricoh Co Ltd Liquid jet device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223986A (en) * 1975-08-19 1977-02-23 Nippon Steel Corp Method of detecting surface flaws
JPS5412837A (en) * 1977-06-30 1979-01-30 Ricoh Co Ltd Liquid jet device

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