JPS6224977U - - Google Patents

Info

Publication number
JPS6224977U
JPS6224977U JP11682185U JP11682185U JPS6224977U JP S6224977 U JPS6224977 U JP S6224977U JP 11682185 U JP11682185 U JP 11682185U JP 11682185 U JP11682185 U JP 11682185U JP S6224977 U JPS6224977 U JP S6224977U
Authority
JP
Japan
Prior art keywords
plate
blowing device
substantially constant
shaped body
conveying direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11682185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11682185U priority Critical patent/JPS6224977U/ja
Publication of JPS6224977U publication Critical patent/JPS6224977U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP11682185U 1985-07-30 1985-07-30 Pending JPS6224977U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11682185U JPS6224977U (US07534539-20090519-C00280.png) 1985-07-30 1985-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11682185U JPS6224977U (US07534539-20090519-C00280.png) 1985-07-30 1985-07-30

Publications (1)

Publication Number Publication Date
JPS6224977U true JPS6224977U (US07534539-20090519-C00280.png) 1987-02-16

Family

ID=31001769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11682185U Pending JPS6224977U (US07534539-20090519-C00280.png) 1985-07-30 1985-07-30

Country Status (1)

Country Link
JP (1) JPS6224977U (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012201437A (ja) * 2011-03-24 2012-10-22 Tokyo Electron Ltd 基板搬送装置及び基板搬送方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012201437A (ja) * 2011-03-24 2012-10-22 Tokyo Electron Ltd 基板搬送装置及び基板搬送方法

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