JPS62247597A - 絶縁層の構造 - Google Patents
絶縁層の構造Info
- Publication number
- JPS62247597A JPS62247597A JP8921986A JP8921986A JPS62247597A JP S62247597 A JPS62247597 A JP S62247597A JP 8921986 A JP8921986 A JP 8921986A JP 8921986 A JP8921986 A JP 8921986A JP S62247597 A JPS62247597 A JP S62247597A
- Authority
- JP
- Japan
- Prior art keywords
- polyimide film
- insulating layer
- filler
- film
- photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920001721 polyimide Polymers 0.000 claims description 34
- 239000010410 layer Substances 0.000 claims description 32
- 239000000945 filler Substances 0.000 claims description 18
- 239000011229 interlayer Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 229920000535 Tan II Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- BIVUUOPIAYRCAP-UHFFFAOYSA-N aminoazanium;chloride Chemical compound Cl.NN BIVUUOPIAYRCAP-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000008642 heat stress Effects 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8921986A JPS62247597A (ja) | 1986-04-19 | 1986-04-19 | 絶縁層の構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8921986A JPS62247597A (ja) | 1986-04-19 | 1986-04-19 | 絶縁層の構造 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP231793A Division JPH0831696B2 (ja) | 1993-01-11 | 1993-01-11 | 絶縁層の構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62247597A true JPS62247597A (ja) | 1987-10-28 |
| JPH0546998B2 JPH0546998B2 (enrdf_load_stackoverflow) | 1993-07-15 |
Family
ID=13964614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8921986A Granted JPS62247597A (ja) | 1986-04-19 | 1986-04-19 | 絶縁層の構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62247597A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0298995A (ja) * | 1988-10-06 | 1990-04-11 | Ibiden Co Ltd | 多層配線板の製造方法 |
| JPH03276794A (ja) * | 1990-03-27 | 1991-12-06 | Fujitsu Ltd | 回路基板 |
| JPH04103196A (ja) * | 1990-08-23 | 1992-04-06 | Nec Corp | 高密度多層配線基板のコーティング方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101525664B1 (ko) * | 2013-06-12 | 2015-06-03 | 현대중공업 주식회사 | 액화가스 처리 시스템 및 방법 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52149358A (en) * | 1976-06-08 | 1977-12-12 | Fujitsu Ltd | Multilayer wiring method |
| JPS55105399A (en) * | 1979-02-08 | 1980-08-12 | Cho Lsi Gijutsu Kenkyu Kumiai | Multilayer wired circuit board |
-
1986
- 1986-04-19 JP JP8921986A patent/JPS62247597A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52149358A (en) * | 1976-06-08 | 1977-12-12 | Fujitsu Ltd | Multilayer wiring method |
| JPS55105399A (en) * | 1979-02-08 | 1980-08-12 | Cho Lsi Gijutsu Kenkyu Kumiai | Multilayer wired circuit board |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0298995A (ja) * | 1988-10-06 | 1990-04-11 | Ibiden Co Ltd | 多層配線板の製造方法 |
| JPH03276794A (ja) * | 1990-03-27 | 1991-12-06 | Fujitsu Ltd | 回路基板 |
| JPH04103196A (ja) * | 1990-08-23 | 1992-04-06 | Nec Corp | 高密度多層配線基板のコーティング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546998B2 (enrdf_load_stackoverflow) | 1993-07-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |