JPS62232911A - 磁性膜形成装置 - Google Patents

磁性膜形成装置

Info

Publication number
JPS62232911A
JPS62232911A JP7718886A JP7718886A JPS62232911A JP S62232911 A JPS62232911 A JP S62232911A JP 7718886 A JP7718886 A JP 7718886A JP 7718886 A JP7718886 A JP 7718886A JP S62232911 A JPS62232911 A JP S62232911A
Authority
JP
Japan
Prior art keywords
magnetic field
magnetic
substrate
film forming
generating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7718886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0584657B2 (enrdf_load_stackoverflow
Inventor
Mitsuhiro Kamei
亀井　光浩
Keiji Arimatsu
有松　啓治
Hidetsugu Setoyama
英嗣 瀬戸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7718886A priority Critical patent/JPS62232911A/ja
Publication of JPS62232911A publication Critical patent/JPS62232911A/ja
Publication of JPH0584657B2 publication Critical patent/JPH0584657B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP7718886A 1986-04-03 1986-04-03 磁性膜形成装置 Granted JPS62232911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7718886A JPS62232911A (ja) 1986-04-03 1986-04-03 磁性膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7718886A JPS62232911A (ja) 1986-04-03 1986-04-03 磁性膜形成装置

Publications (2)

Publication Number Publication Date
JPS62232911A true JPS62232911A (ja) 1987-10-13
JPH0584657B2 JPH0584657B2 (enrdf_load_stackoverflow) 1993-12-02

Family

ID=13626840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7718886A Granted JPS62232911A (ja) 1986-04-03 1986-04-03 磁性膜形成装置

Country Status (1)

Country Link
JP (1) JPS62232911A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01294859A (ja) * 1988-05-23 1989-11-28 Hitachi Ltd 対向ターゲツト式スパツタリング装置
US5630916A (en) * 1993-03-02 1997-05-20 Cvc Products, Inc. Magnetic orienting device for thin film deposition and method of use
WO1997042649A1 (en) * 1996-05-07 1997-11-13 Nordiko Limited Magnet array
US6042707A (en) * 1998-05-22 2000-03-28 Cvc Products, Inc. Multiple-coil electromagnet for magnetically orienting thin films
US6106682A (en) * 1998-05-22 2000-08-22 Cvc Products, Inc. Thin-film processing electromagnet for low-skew magnetic orientation
JP2008010540A (ja) * 2006-06-28 2008-01-17 Shin Etsu Chem Co Ltd 径方向磁場発生用磁気回路及び磁気記録媒体
WO2019011161A1 (zh) * 2017-07-14 2019-01-17 北京北方华创微电子装备有限公司 磁性薄膜沉积腔室及薄膜沉积设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182711A (ja) * 1984-02-29 1985-09-18 Konishiroku Photo Ind Co Ltd 磁性薄膜の形成方法およびその装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182711A (ja) * 1984-02-29 1985-09-18 Konishiroku Photo Ind Co Ltd 磁性薄膜の形成方法およびその装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01294859A (ja) * 1988-05-23 1989-11-28 Hitachi Ltd 対向ターゲツト式スパツタリング装置
US5630916A (en) * 1993-03-02 1997-05-20 Cvc Products, Inc. Magnetic orienting device for thin film deposition and method of use
US5902466A (en) * 1993-03-02 1999-05-11 Cvc Products, Inc. Sputtering apparatus with magnetic orienting device for thin film deposition
US6235164B1 (en) * 1993-03-02 2001-05-22 Cvc Products, Inc. Low-pressure processing system for magnetic orientation of thin magnetic film
WO1997042649A1 (en) * 1996-05-07 1997-11-13 Nordiko Limited Magnet array
US6042707A (en) * 1998-05-22 2000-03-28 Cvc Products, Inc. Multiple-coil electromagnet for magnetically orienting thin films
US6106682A (en) * 1998-05-22 2000-08-22 Cvc Products, Inc. Thin-film processing electromagnet for low-skew magnetic orientation
US6126790A (en) * 1998-05-22 2000-10-03 Cvc Products, Inc. Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet
US6475359B1 (en) 1998-05-22 2002-11-05 Cvc Products, Inc. Thin-film processing electromagnet with modified core for producing low-skew magnetic orientation
JP2008010540A (ja) * 2006-06-28 2008-01-17 Shin Etsu Chem Co Ltd 径方向磁場発生用磁気回路及び磁気記録媒体
WO2019011161A1 (zh) * 2017-07-14 2019-01-17 北京北方华创微电子装备有限公司 磁性薄膜沉积腔室及薄膜沉积设备

Also Published As

Publication number Publication date
JPH0584657B2 (enrdf_load_stackoverflow) 1993-12-02

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Legal Events

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LAPS Cancellation because of no payment of annual fees