JPS6222509U - - Google Patents

Info

Publication number
JPS6222509U
JPS6222509U JP11320585U JP11320585U JPS6222509U JP S6222509 U JPS6222509 U JP S6222509U JP 11320585 U JP11320585 U JP 11320585U JP 11320585 U JP11320585 U JP 11320585U JP S6222509 U JPS6222509 U JP S6222509U
Authority
JP
Japan
Prior art keywords
driven body
position detection
detection marker
reflectance
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11320585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11320585U priority Critical patent/JPS6222509U/ja
Publication of JPS6222509U publication Critical patent/JPS6222509U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP11320585U 1985-07-24 1985-07-24 Pending JPS6222509U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11320585U JPS6222509U (US06815460-20041109-C00097.png) 1985-07-24 1985-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11320585U JPS6222509U (US06815460-20041109-C00097.png) 1985-07-24 1985-07-24

Publications (1)

Publication Number Publication Date
JPS6222509U true JPS6222509U (US06815460-20041109-C00097.png) 1987-02-10

Family

ID=30994783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11320585U Pending JPS6222509U (US06815460-20041109-C00097.png) 1985-07-24 1985-07-24

Country Status (1)

Country Link
JP (1) JPS6222509U (US06815460-20041109-C00097.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313453A (en) * 1976-07-23 1978-02-07 Chisso Corp Two point contactless optical displacement measuring apparatus
JPS5529767A (en) * 1978-08-24 1980-03-03 Agency Of Ind Science & Technol Measuring method for displacement of target mark

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313453A (en) * 1976-07-23 1978-02-07 Chisso Corp Two point contactless optical displacement measuring apparatus
JPS5529767A (en) * 1978-08-24 1980-03-03 Agency Of Ind Science & Technol Measuring method for displacement of target mark

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