JPS6220651U - - Google Patents

Info

Publication number
JPS6220651U
JPS6220651U JP11022585U JP11022585U JPS6220651U JP S6220651 U JPS6220651 U JP S6220651U JP 11022585 U JP11022585 U JP 11022585U JP 11022585 U JP11022585 U JP 11022585U JP S6220651 U JPS6220651 U JP S6220651U
Authority
JP
Japan
Prior art keywords
stage
dust
electrostatic precipitator
containing gas
charging section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11022585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11022585U priority Critical patent/JPS6220651U/ja
Publication of JPS6220651U publication Critical patent/JPS6220651U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrostatic Separation (AREA)
JP11022585U 1985-07-18 1985-07-18 Pending JPS6220651U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11022585U JPS6220651U (US20100056889A1-20100304-C00004.png) 1985-07-18 1985-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11022585U JPS6220651U (US20100056889A1-20100304-C00004.png) 1985-07-18 1985-07-18

Publications (1)

Publication Number Publication Date
JPS6220651U true JPS6220651U (US20100056889A1-20100304-C00004.png) 1987-02-07

Family

ID=30989050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11022585U Pending JPS6220651U (US20100056889A1-20100304-C00004.png) 1985-07-18 1985-07-18

Country Status (1)

Country Link
JP (1) JPS6220651U (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498034A (ja) * 1990-08-15 1992-03-30 Takasago Thermal Eng Co Ltd 半導体製造用クリーンルームの海塩粒子汚染防止方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288873A (en) * 1976-01-20 1977-07-25 Matsushita Electric Ind Co Ltd Air cleaner

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288873A (en) * 1976-01-20 1977-07-25 Matsushita Electric Ind Co Ltd Air cleaner

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498034A (ja) * 1990-08-15 1992-03-30 Takasago Thermal Eng Co Ltd 半導体製造用クリーンルームの海塩粒子汚染防止方法

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