JPS6220378A - 集積圧力センサ素子 - Google Patents
集積圧力センサ素子Info
- Publication number
- JPS6220378A JPS6220378A JP15809585A JP15809585A JPS6220378A JP S6220378 A JPS6220378 A JP S6220378A JP 15809585 A JP15809585 A JP 15809585A JP 15809585 A JP15809585 A JP 15809585A JP S6220378 A JPS6220378 A JP S6220378A
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- resistors
- pressure sensor
- adjustment
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003321 amplification Effects 0.000 claims description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15809585A JPS6220378A (ja) | 1985-07-19 | 1985-07-19 | 集積圧力センサ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15809585A JPS6220378A (ja) | 1985-07-19 | 1985-07-19 | 集積圧力センサ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6220378A true JPS6220378A (ja) | 1987-01-28 |
| JPH0564864B2 JPH0564864B2 (enrdf_load_stackoverflow) | 1993-09-16 |
Family
ID=15664192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15809585A Granted JPS6220378A (ja) | 1985-07-19 | 1985-07-19 | 集積圧力センサ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6220378A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241969A (ja) * | 1987-03-30 | 1988-10-07 | Shindengen Electric Mfg Co Ltd | 半導体圧力センサ |
| JPH081095U (ja) * | 1990-12-14 | 1996-07-02 | 株式会社アステック入江 | 複合管用管端面保護具 |
-
1985
- 1985-07-19 JP JP15809585A patent/JPS6220378A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241969A (ja) * | 1987-03-30 | 1988-10-07 | Shindengen Electric Mfg Co Ltd | 半導体圧力センサ |
| JPH081095U (ja) * | 1990-12-14 | 1996-07-02 | 株式会社アステック入江 | 複合管用管端面保護具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0564864B2 (enrdf_load_stackoverflow) | 1993-09-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |