JPS62202897A - Production of diamond - Google Patents

Production of diamond

Info

Publication number
JPS62202897A
JPS62202897A JP4292286A JP4292286A JPS62202897A JP S62202897 A JPS62202897 A JP S62202897A JP 4292286 A JP4292286 A JP 4292286A JP 4292286 A JP4292286 A JP 4292286A JP S62202897 A JPS62202897 A JP S62202897A
Authority
JP
Japan
Prior art keywords
substrate
reaction gas
vessel
reaction
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4292286A
Inventor
Tadao Inuzuka
Yoshinori Kuwae
Atsuhito Sawabe
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP4292286A priority Critical patent/JPS62202897A/en
Publication of JPS62202897A publication Critical patent/JPS62202897A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To produce diamond having improved adhesivity to a substrate and smoothness, by introducing a reaction gas containing an organic compound into a reaction vessel containing a substrate having the surface on which a metal vapor is deposited and decomposing the reaction gas.
CONSTITUTION: A substrate 5 having the surface on which vapor of a metal, e.g. selenium, is deposited in the form of islands having ≤5,000Å diameter and/or a film having ≤1μm film thickness is held by a substrate holder 4 in a reaction vessel 1 and heated to ≥400°C by a heat source 6. A reaction gas prepared by blending an organic compound, e.g. methane, with H2 at 0.001W1.0 volume ratio is introduced from a gas inlet 2 into the vessel 1 to keep the pressure in the vessel 1 at 102W104Torr. A current is simultaneously passed through a heating filament 7 to increase the temperature thereof and the reaction gas is decomposed to grow diamond on the substrate 5.
COPYRIGHT: (C)1987,JPO&Japio
JP4292286A 1986-02-28 1986-02-28 Production of diamond Pending JPS62202897A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4292286A JPS62202897A (en) 1986-02-28 1986-02-28 Production of diamond

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4292286A JPS62202897A (en) 1986-02-28 1986-02-28 Production of diamond

Publications (1)

Publication Number Publication Date
JPS62202897A true JPS62202897A (en) 1987-09-07

Family

ID=12649514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4292286A Pending JPS62202897A (en) 1986-02-28 1986-02-28 Production of diamond

Country Status (1)

Country Link
JP (1) JPS62202897A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63166733A (en) * 1986-12-27 1988-07-09 Kyocera Corp Production of diamond film
JPH0218392A (en) * 1988-05-27 1990-01-22 Xerox Corp Production of polycrystalline diamond film
US5206083A (en) * 1989-09-18 1993-04-27 Cornell Research Foundation, Inc. Diamond and diamond-like films and coatings prepared by deposition on substrate that contain a dispersion of diamond particles
US5328761A (en) * 1990-10-05 1994-07-12 Sumitomo Electric Industries, Ltd. Diamond-coated hard material, throwaway insert and a process for the production thereof
US5593719A (en) * 1994-03-29 1997-01-14 Southwest Research Institute Treatments to reduce frictional wear between components made of ultra-high molecular weight polyethylene and metal alloys
US5605714A (en) * 1994-03-29 1997-02-25 Southwest Research Institute Treatments to reduce thrombogeneticity in heart valves made from titanium and its alloys
US5725573A (en) * 1994-03-29 1998-03-10 Southwest Research Institute Medical implants made of metal alloys bearing cohesive diamond like carbon coatings
US5731045A (en) * 1996-01-26 1998-03-24 Southwest Research Institute Application of diamond-like carbon coatings to cobalt-cemented tungsten carbide components
US5780119A (en) * 1996-03-20 1998-07-14 Southwest Research Institute Treatments to reduce friction and wear on metal alloy components
US5939140A (en) * 1994-06-13 1999-08-17 Sumitomo Electric Industries, Ltd. Hot filament CVD of diamond films
US5945153A (en) * 1994-07-11 1999-08-31 Southwest Research Institute Non-irritating antimicrobial coating for medical implants and a process for preparing same
US8087971B2 (en) 2006-03-30 2012-01-03 Konami Digital Entertainment Co., Ltd. Doll toy

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63166733A (en) * 1986-12-27 1988-07-09 Kyocera Corp Production of diamond film
JPH0218392A (en) * 1988-05-27 1990-01-22 Xerox Corp Production of polycrystalline diamond film
US5206083A (en) * 1989-09-18 1993-04-27 Cornell Research Foundation, Inc. Diamond and diamond-like films and coatings prepared by deposition on substrate that contain a dispersion of diamond particles
US5328761A (en) * 1990-10-05 1994-07-12 Sumitomo Electric Industries, Ltd. Diamond-coated hard material, throwaway insert and a process for the production thereof
US5725573A (en) * 1994-03-29 1998-03-10 Southwest Research Institute Medical implants made of metal alloys bearing cohesive diamond like carbon coatings
US5593719A (en) * 1994-03-29 1997-01-14 Southwest Research Institute Treatments to reduce frictional wear between components made of ultra-high molecular weight polyethylene and metal alloys
US5605714A (en) * 1994-03-29 1997-02-25 Southwest Research Institute Treatments to reduce thrombogeneticity in heart valves made from titanium and its alloys
US5939140A (en) * 1994-06-13 1999-08-17 Sumitomo Electric Industries, Ltd. Hot filament CVD of diamond films
US5984905A (en) * 1994-07-11 1999-11-16 Southwest Research Institute Non-irritating antimicrobial coating for medical implants and a process for preparing same
US6361567B1 (en) 1994-07-11 2002-03-26 Southwest Research Institute Non-irritating antimicrobial coating for medical implants and a process for preparing same
US5945153A (en) * 1994-07-11 1999-08-31 Southwest Research Institute Non-irritating antimicrobial coating for medical implants and a process for preparing same
US5731045A (en) * 1996-01-26 1998-03-24 Southwest Research Institute Application of diamond-like carbon coatings to cobalt-cemented tungsten carbide components
US5780119A (en) * 1996-03-20 1998-07-14 Southwest Research Institute Treatments to reduce friction and wear on metal alloy components
US8087971B2 (en) 2006-03-30 2012-01-03 Konami Digital Entertainment Co., Ltd. Doll toy

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